Experimental and numerical studies of microwave-plasma interaction in a MWPECVD reactor. Massaro, A., Velardi, L., Taccogna, F., & Cicala, G. AIP Advances, 2016.
Experimental and numerical studies of microwave-plasma interaction in a MWPECVD reactor [link]Paper  doi  bibtex   
@ARTICLE{Massaro2016,
author={Massaro, A. and Velardi, L. and Taccogna, F. and Cicala, G.},
title={Experimental and numerical studies of microwave-plasma interaction in a MWPECVD reactor},
journal={AIP Advances},
year={2016},
volume={6},
number={12},
doi={10.1063/1.4971426},
art_number={125001},
url={https://www.scopus.com/inward/record.uri?eid=2-s2.0-85002496917&doi=10.1063%2f1.4971426&partnerID=40&md5=43eb657da642df30047c972dad8efd42},
document_type={Article},
source={Scopus},
}
Downloads: 0