@article{MEYER2021113320,
title = {Site-specific plan-view TEM lamella preparation of pristine surfaces with a large field of view},
journal = {Ultramicroscopy},
volume = {228},
pages = {113320},
year = {2021},
issn = {0304-3991},
doi = {https://doi.org/10.1016/j.ultramic.2021.113320},
url = {https://www.sciencedirect.com/science/article/pii/S0304399121001054},
author = {Tobias Meyer and Tobias Westphal and Birte Kressdorf and Ulrich Ross and Christian Jooss and Michael Seibt},
keywords = {TEM, Lamella, Preparation, Plan-view, Site-specific, Field of view},
abstract = {Transmission electron microscopy has become a major characterization tool with an ever increasing variety of methods being applied in a wide range of scientific fields. However, the probably most famous pitfall in related workflows is the preparation of high-quality electron-transparent lamellae enabling for extraction of valuable information. Particularly in the field of solid state physics and materials science, it often required to study the surface of a macroscopic specimen with plan-view orientation. Nevertheless, despite tremendous advances in instrumentation, i.e. focused ion beam, the yield of existing plan-view lamellae preparation techniques is relatively low compared to cross-sectional extraction methods. Furthermore, techniques relying on mechanical treatments, i.e. conventional preparation, compromise site-specifity. In this paper, we demonstrate that by combining a mechanical grinding step prior to backside lift-out in the focused ion beam plan-view lamellae preparation becomes increasingly easy. The suggested strategy combines site-specifity with micrometer precision as well as possible investigation of pristine surfaces with a field of view of several hundred square micrometers.}
}

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However, the probably most famous pitfall in related workflows is the preparation of high-quality electron-transparent lamellae enabling for extraction of valuable information. Particularly in the field of solid state physics and materials science, it often required to study the surface of a macroscopic specimen with plan-view orientation. Nevertheless, despite tremendous advances in instrumentation, i.e. focused ion beam, the yield of existing plan-view lamellae preparation techniques is relatively low compared to cross-sectional extraction methods. Furthermore, techniques relying on mechanical treatments, i.e. conventional preparation, compromise site-specifity. In this paper, we demonstrate that by combining a mechanical grinding step prior to backside lift-out in the focused ion beam plan-view lamellae preparation becomes increasingly easy. The suggested strategy combines site-specifity with micrometer precision as well as possible investigation of pristine surfaces with a field of view of several hundred square micrometers.","bibtex":"@article{MEYER2021113320,\r\ntitle = {Site-specific plan-view TEM lamella preparation of pristine surfaces with a large field of view},\r\njournal = {Ultramicroscopy},\r\nvolume = {228},\r\npages = {113320},\r\nyear = {2021},\r\nissn = {0304-3991},\r\ndoi = {https://doi.org/10.1016/j.ultramic.2021.113320},\r\nurl = {https://www.sciencedirect.com/science/article/pii/S0304399121001054},\r\nauthor = {Tobias Meyer and Tobias Westphal and Birte Kressdorf and Ulrich Ross and Christian Jooss and Michael Seibt},\r\nkeywords = {TEM, Lamella, Preparation, Plan-view, Site-specific, Field of view},\r\nabstract = {Transmission electron microscopy has become a major characterization tool with an ever increasing variety of methods being applied in a wide range of scientific fields. However, the probably most famous pitfall in related workflows is the preparation of high-quality electron-transparent lamellae enabling for extraction of valuable information. Particularly in the field of solid state physics and materials science, it often required to study the surface of a macroscopic specimen with plan-view orientation. Nevertheless, despite tremendous advances in instrumentation, i.e. focused ion beam, the yield of existing plan-view lamellae preparation techniques is relatively low compared to cross-sectional extraction methods. Furthermore, techniques relying on mechanical treatments, i.e. conventional preparation, compromise site-specifity. In this paper, we demonstrate that by combining a mechanical grinding step prior to backside lift-out in the focused ion beam plan-view lamellae preparation becomes increasingly easy. The suggested strategy combines site-specifity with micrometer precision as well as possible investigation of pristine surfaces with a field of view of several hundred square micrometers.}\r\n}\r\n\r\n","author_short":["Meyer, T.","Westphal, T.","Kressdorf, B.","Ross, U.","Jooss, C.","Seibt, M."],"key":"MEYER2021113320","id":"MEYER2021113320","bibbaseid":"meyer-westphal-kressdorf-ross-jooss-seibt-sitespecificplanviewtemlamellapreparationofpristinesurfaceswithalargefieldofview-2021","role":"author","urls":{"Paper":"https://www.sciencedirect.com/science/article/pii/S0304399121001054"},"keyword":["TEM","Lamella","Preparation","Plan-view","Site-specific","Field of view"],"metadata":{"authorlinks":{}}},"bibtype":"article","biburl":"https://www.uni-goettingen.de/de/678870.html","dataSources":["hxaG7jkDkJocP2dGM","J9HHmB7QwWjt7SPyk","iWA2dgWDwhdJDAnw5"],"keywords":["tem","lamella","preparation","plan-view","site-specific","field of view"],"search_terms":["site","specific","plan","view","tem","lamella","preparation","pristine","surfaces","large","field","view","meyer","westphal","kressdorf","ross","jooss","seibt"],"title":"Site-specific plan-view TEM lamella preparation of pristine surfaces with a large field of view","year":2021}