Computational modeling in semiconductor processing. Meyyappan, M., editor Artech House, Boston, 1995. bibtex @book{meyyappan_computational_1995,
address = {Boston},
series = {The {Artech} {House} materials science library},
title = {Computational modeling in semiconductor processing},
isbn = {978-0-89006-707-9},
publisher = {Artech House},
editor = {Meyyappan, M.},
year = {1995},
keywords = {Design and construction Data processing, Mathematical models, Process control, Semiconductor industry, Semiconductors},
}
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