@book{meyyappan_computational_1995,
	address = {Boston},
	series = {The {Artech} {House} materials science library},
	title = {Computational modeling in semiconductor processing},
	isbn = {978-0-89006-707-9},
	publisher = {Artech House},
	editor = {Meyyappan, M.},
	year = {1995},
	keywords = {Design and construction Data processing, Mathematical models, Process control, Semiconductor industry, Semiconductors},
}

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