Dynamics of hydrogenated amorphous silicon flexural resonators for enhanced performance. Mouro, J., Chu, V., & Conde, J. P. JOURNAL OF APPLIED PHYSICS, APR 21, 2016.
doi  abstract   bibtex   
Hydrogenated amorphous silicon thin-film flexural resonators with sub-micron actuation gaps are fabricated by surface micromachining on glass substrates. Experimentally, the resonators are electrostatically actuated and their motion is optically detected. Three different configurations for the electrostatic excitation force are used to study the dynamics of the resonators. In the first case, a dc voltage (V-dc) is added to an ac voltage with variable excitation frequency (V-ac(omega)) and harmonic, superharmonic, and subharmonic resonances of different orders are observed. The second case consists on mixing the dc voltage (V-dc) with an ac voltage applied at a fixed frequency of twice the natural frequency of the resonator (V(2 omega(0))). High-amplitude parametric resonance is excited at the natural frequency of the system, omega(0). This configuration allows a separation between the frequencies of the excitation and the mechanical motion. Finally, in the third case, the dc voltage (V-dc) is combined with both ac voltages, V-ac(omega) and V(2 omega(0)), and parametric resonance is excited and emerges from the fundamental harmonic resonance peak. The single-degree-of-freedom equation of motion is modeled and discussed for each case. The nonlinearity inherent to the electrostatic force is responsible for modulating the spring constant of the system at different frequencies, giving rise to parametric resonance. These equations of motion are simulated in the time and frequency domains, providing a consistent explanation of the experimentally observed phenomena. A wide variety of possible resonance modes with different characteristics can be used advantageously in MEMS device design. Published by AIP Publishing.
@article{ ISI:000378991800022,
Author = {Mouro, J. and Chu, V. and Conde, J. P.},
Title = {{Dynamics of hydrogenated amorphous silicon flexural resonators for
   enhanced performance}},
Journal = {{JOURNAL OF APPLIED PHYSICS}},
Year = {{2016}},
Volume = {{119}},
Number = {{15}},
Month = {{APR 21}},
Abstract = {{Hydrogenated amorphous silicon thin-film flexural resonators with
   sub-micron actuation gaps are fabricated by surface micromachining on
   glass substrates. Experimentally, the resonators are electrostatically
   actuated and their motion is optically detected. Three different
   configurations for the electrostatic excitation force are used to study
   the dynamics of the resonators. In the first case, a dc voltage (V-dc)
   is added to an ac voltage with variable excitation frequency
   (V-ac(omega)) and harmonic, superharmonic, and subharmonic resonances of
   different orders are observed. The second case consists on mixing the dc
   voltage (V-dc) with an ac voltage applied at a fixed frequency of twice
   the natural frequency of the resonator (V(2 omega(0))). High-amplitude
   parametric resonance is excited at the natural frequency of the system,
   omega(0). This configuration allows a separation between the frequencies
   of the excitation and the mechanical motion. Finally, in the third case,
   the dc voltage (V-dc) is combined with both ac voltages, V-ac(omega) and
   V(2 omega(0)), and parametric resonance is excited and emerges from the
   fundamental harmonic resonance peak. The single-degree-of-freedom
   equation of motion is modeled and discussed for each case. The
   nonlinearity inherent to the electrostatic force is responsible for
   modulating the spring constant of the system at different frequencies,
   giving rise to parametric resonance. These equations of motion are
   simulated in the time and frequency domains, providing a consistent
   explanation of the experimentally observed phenomena. A wide variety of
   possible resonance modes with different characteristics can be used
   advantageously in MEMS device design. Published by AIP Publishing.}},
DOI = {{10.1063/1.4946040}},
Article-Number = {{154501}},
ISSN = {{0021-8979}},
EISSN = {{1089-7550}},
ResearcherID-Numbers = {{Conde, Joao Pedro/F-8533-2012
   Chu, Virginia/I-6048-2014
   }},
ORCID-Numbers = {{Conde, Joao Pedro/0000-0002-5677-3024
   Chu, Virginia/0000-0002-5306-4409
   Mouro, Joao/0000-0002-2572-0974}},
Unique-ID = {{ISI:000378991800022}},
}
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