@inproceedings{murthy_optimization_2000,
	address = {Ottawa, Canada},
	title = {Optimization of n[sup +] mu c-{Si}:{H} contact layer for low leakage current in a-{Si}:{H} thin film transistors},
	volume = {18},
	shorttitle = {Optimization of n[sup +] mu c-{Si}},
	url = {http://link.aip.org/link/?JVA/18/685/1},
	doi = {10.1116/1.582248},
	urldate = {2010-07-09},
	booktitle = {Papers from the ninth canadian semiconductor technology conference},
	publisher = {AVS},
	author = {Murthy, R. V. R. and Servati, P. and Nathan, A. and Chamberlain, S. G.},
	month = mar,
	year = {2000},
	keywords = {chemical interdiffusion, defect states, elemental semiconductors, hydrogen, leakage currents, silicon, thin film transistors},
	pages = {685--687},
}

{"_id":"RKsjisq6LKpdJZwGw","bibbaseid":"murthy-servati-nathan-chamberlain-optimizationofnsupmucsihcontactlayerforlowleakagecurrentinasihthinfilmtransistors-2000","author_short":["Murthy, R. V. R.","Servati, P.","Nathan, A.","Chamberlain, S. G."],"bibdata":{"bibtype":"inproceedings","type":"inproceedings","address":"Ottawa, Canada","title":"Optimization of n[sup +] mu c-Si:H contact layer for low leakage current in a-Si:H thin film transistors","volume":"18","shorttitle":"Optimization of n[sup +] mu c-Si","url":"http://link.aip.org/link/?JVA/18/685/1","doi":"10.1116/1.582248","urldate":"2010-07-09","booktitle":"Papers from the ninth canadian semiconductor technology conference","publisher":"AVS","author":[{"propositions":[],"lastnames":["Murthy"],"firstnames":["R.","V.","R."],"suffixes":[]},{"propositions":[],"lastnames":["Servati"],"firstnames":["P."],"suffixes":[]},{"propositions":[],"lastnames":["Nathan"],"firstnames":["A."],"suffixes":[]},{"propositions":[],"lastnames":["Chamberlain"],"firstnames":["S.","G."],"suffixes":[]}],"month":"March","year":"2000","keywords":"chemical interdiffusion, defect states, elemental semiconductors, hydrogen, leakage currents, silicon, thin film transistors","pages":"685–687","bibtex":"@inproceedings{murthy_optimization_2000,\n\taddress = {Ottawa, Canada},\n\ttitle = {Optimization of n[sup +] mu c-{Si}:{H} contact layer for low leakage current in a-{Si}:{H} thin film transistors},\n\tvolume = {18},\n\tshorttitle = {Optimization of n[sup +] mu c-{Si}},\n\turl = {http://link.aip.org/link/?JVA/18/685/1},\n\tdoi = {10.1116/1.582248},\n\turldate = {2010-07-09},\n\tbooktitle = {Papers from the ninth canadian semiconductor technology conference},\n\tpublisher = {AVS},\n\tauthor = {Murthy, R. V. R. and Servati, P. and Nathan, A. and Chamberlain, S. G.},\n\tmonth = mar,\n\tyear = {2000},\n\tkeywords = {chemical interdiffusion, defect states, elemental semiconductors, hydrogen, leakage currents, silicon, thin film transistors},\n\tpages = {685--687},\n}\n\n","author_short":["Murthy, R. V. R.","Servati, P.","Nathan, A.","Chamberlain, S. G."],"key":"murthy_optimization_2000","id":"murthy_optimization_2000","bibbaseid":"murthy-servati-nathan-chamberlain-optimizationofnsupmucsihcontactlayerforlowleakagecurrentinasihthinfilmtransistors-2000","role":"author","urls":{"Paper":"http://link.aip.org/link/?JVA/18/685/1"},"keyword":["chemical interdiffusion","defect states","elemental semiconductors","hydrogen","leakage currents","silicon","thin film transistors"],"metadata":{"authorlinks":{}},"html":""},"bibtype":"inproceedings","biburl":"https://bibbase.org/zotero/spintextures","dataSources":["rXHvWQJHcL8ctHS4s"],"keywords":["chemical interdiffusion","defect states","elemental semiconductors","hydrogen","leakage currents","silicon","thin film transistors"],"search_terms":["optimization","sup","contact","layer","low","leakage","current","thin","film","transistors","murthy","servati","nathan","chamberlain"],"title":"Optimization of n[sup +] mu c-Si:H contact layer for low leakage current in a-Si:H thin film transistors","year":2000}