@inproceedings{nicolosi_first_2001,
	address = {San Diego, CA, USA},
	title = {First realization and characterization of multilayer {EUV} reflective coatings},
	url = {http://link.aip.org/link/?PSI/4506/76/1&Agg=doi},
	doi = {10.1117/12.450947},
	urldate = {2010-08-02TZ},
	booktitle = {Proceedings of {SPIE}},
	author = {Nicolosi, Piergiorgio},
	year = {2001},
	pages = {76--83}
}

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