mems/nems handbook:Â techniques And applications. Oboe, R., Lasalandra, E., & White, M. In Kluwer Academic Publishers, 2005.
bibtex   
@incollection{oboe_mems/nems_2005,
	title = {mems/nems handbook:Â techniques {And} applications},
	publisher = {Kluwer Academic Publishers},
	author = {Oboe, R. and Lasalandra, E. and White, M.},
	year = {2005}
}
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