Stabilizing shallow color centers in diamond created by nitrogen delta-doping using SF6 plasma treatment. Osterkamp, C., Lang, J., Scharpf, J., Müller, C., McGuinness, L. P., Diemant, T., Behm, R. J., Naydenov, B., & Jelezko, F. Applied Physics Letters, 106(11):113109, March, 2015. Publisher: American Institute of Physics![Stabilizing shallow color centers in diamond created by nitrogen delta-doping using SF6 plasma treatment [link]](https://bibbase.org/img/filetypes/link.svg "link")
Paper doi abstract bibtex Here we report the fabrication of stable, shallow (\textless5 nm) nitrogen-vacancy (NV) centers in diamond by nitrogen delta doping at the last stage of the chemical vapor deposition growth process. The NVs are stabilized after treating the diamond in SF6 plasma, otherwise the color centers are not observed, suggesting a strong influence from the surface. X-ray photoelectron spectroscopy measurements show the presence of only fluorine atoms on the surface, in contrast to previous studies, indicating very good surface coverage. We managed to detect hydrogen nuclear magnetic resonance signal from protons in the immersion oil, revealing a depth of the NVs of about 5 nm.
@article{osterkamp_stabilizing_2015,
title = {Stabilizing shallow color centers in diamond created by nitrogen delta-doping using {SF6} plasma treatment},
volume = {106},
issn = {0003-6951},
url = {https://aip.scitation.org/doi/10.1063/1.4915305},
doi = {10.1063/1.4915305},
abstract = {Here we report the fabrication of stable, shallow ({\textless}5 nm) nitrogen-vacancy (NV) centers in diamond by nitrogen delta doping at the last stage of the chemical vapor deposition growth process. The NVs are stabilized after treating the diamond in SF6 plasma, otherwise the color centers are not observed, suggesting a strong influence from the surface. X-ray photoelectron spectroscopy measurements show the presence of only fluorine atoms on the surface, in contrast to previous studies, indicating very good surface coverage. We managed to detect hydrogen nuclear magnetic resonance signal from protons in the immersion oil, revealing a depth of the NVs of about 5 nm.},
number = {11},
urldate = {2022-08-12},
journal = {Applied Physics Letters},
author = {Osterkamp, Christian and Lang, Johannes and Scharpf, Jochen and Müller, Christoph and McGuinness, Liam Paul and Diemant, Thomas and Behm, R. Jürgen and Naydenov, Boris and Jelezko, Fedor},
month = mar,
year = {2015},
note = {Publisher: American Institute of Physics},
pages = {113109},
}
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