Monolithic Silicon Probes with Flexible Parylene Cables for Neural Prostheses

Monolithic Silicon Probes with Flexible Parylene Cables for Neural Prostheses. Pang, C., Cham, J. G., Musallam, S., Tai, Y., Burdick, J. W., & Andersen, R. A. In 1st IEEE International Conference on Nano/Micro Engineered and Molecular Systems (IEEE-NEMS '06.), pages 1125 -1128, jan., 2006.

Paper doi abstract bibtex 2 downloads

This work presents the first parylene-insulated silicon probes, which are used for neural prostheses to record high-level cognitive neural signals. With parylene technology, our probes have several advantages compared with the current devices. First, instead of inorganic materials (e.g. silicon dioxide, silicon nitride), the electrodes and conduction traces on the probes are insulated by parylene, an easily-deposited polymer with mechanical flexibility and biocompatibility. As a result, the probes exhibit better electrical and mechanical properties. Second, flexible parylene cables are monolithically integrated with the probes, which arm the probes with very high flexibility to be easily assembled to a high density 3-D array and at the same time provide an ideal method to transmit neural signals through skull during chronic recording. The all dry fabrication process and a 4times4 probe array (64 electrodes) were demonstrated. The probes were successfully tested electrically and mechanically in rat cortex. Neural signals were properly recorded

@INPROCEEDINGS{4135145,
author={Pang, Changlin and Cham, J. G. and Musallam, Sam and Tai, Yu-Chong and Burdick, J. W. and Andersen, R. A.},
booktitle={1st IEEE International Conference on Nano/Micro Engineered and Molecular Systems (IEEE-NEMS '06.)}, 
title={Monolithic Silicon Probes with Flexible Parylene Cables for Neural Prostheses},
year={2006},
month={jan.},
volume={},
number={},
pages={1125 -1128},
abstract={This work presents the first parylene-insulated silicon probes, which are used for neural prostheses to record high-level cognitive neural signals. With parylene technology, our probes have several advantages compared with the current devices. First, instead of inorganic materials (e.g. silicon dioxide, silicon nitride), the electrodes and conduction traces on the probes are insulated by parylene, an easily-deposited polymer with mechanical flexibility and biocompatibility. As a result, the probes exhibit better electrical and mechanical properties. Second, flexible parylene cables are monolithically integrated with the probes, which arm the probes with very high flexibility to be easily assembled to a high density 3-D array and at the same time provide an ideal method to transmit neural signals through skull during chronic recording. The all dry fabrication process and a 4times4 probe array (64 electrodes) were demonstrated. The probes were successfully tested electrically and mechanically in rat cortex. Neural signals were properly recorded},
keywords={Si;chronic recording;dry fabrication process;flexible parylene cables;high density 3D array assembly;high level cognitive neural signal recording;monolithic integration;monolithic silicon probes;neural prostheses;neural signal transmission;parylene insulated silicon probes;probe biocompatibility;probe conduction traces;probe electrical properties;probe electrodes;probe mechanical flexibility;probe mechanical properties;rat cortex;biological techniques;biosensors;cognition;microelectrodes;neurophysiology;polymers;probes;prosthetics;silicon;},
doi={10.1109/NEMS.2006.334646},
URL = {http://npl.mcgill.ca/Papers/monolithicsiliconprobes.pdf},
ISSN={},
}

Downloads: 2