Vivo Study of Mechanical Properties for the Monolithic Silicon Probes with Flexible Parylene Cables for Neural Prostheses. Pang, C., Musallam, S., Rizzuto, D., Ustun, C., Tai, Y., Burdick, J. W., & Andersen, R. A. In The 10th International Conference on Miniaturized Systems for Chemistry and Life Sciences (�TAS2006), pages 702-704, 2006.
Vivo Study of Mechanical Properties for the Monolithic Silicon Probes with Flexible Parylene Cables for Neural Prostheses [pdf]Paper  abstract   bibtex   2 downloads  
This work presents the new experimental results for a new monolithic silicon probes array with flexible parylene cables used for neural prostheses. A new technology developed in the Caltech micromachining lab provides great flexibility to fabricate silicon probes with large range of geometries. Instead of the brittle inorganic materials(e.g. SiO2 or Si3N4), parylene is used as the insulating/protecting material on silicon substrate. Parylene is biocompatible and at the same time improves mechanical properties of the silicon probes. Animal tests have been done to validate the mechanical properties of the new silicon probes with different geometries. The results show that the probes have great improvements than other current silicon probes in mechanical properties. Successful chronic implantation shows that the probes are able to penetrate monkey�s pia by hand insertion.

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