Piezoresistive Microphone Design Pareto Optimization: Tradeoff Between Sensitivity and Noise Floor. Papila, M., Haftka, R. T., Nishida, T., & Sheplak, M. Journal of Microelectromechanical Systems, 15(6):1632--1643, December, 2006.
bibtex   
@article{Papila06,
   author = {Melih Papila and Raphael T. Haftka and Toshikazu Nishida and Mark Sheplak},
   title = {Piezoresistive {M}icrophone {D}esign {P}areto {O}ptimization: {T}radeoff {B}etween
   {S}ensitivity and {N}oise {F}loor},
   journal = {Journal of Microelectromechanical Systems},
   volume = {15},
   number = {6},
   pages = {1632--1643},
   month = {December},
   year = {2006}
}

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