Piezoresistive Microphone Design Pareto Optimization: Tradeoff Between Sensitivity and Noise Floor. Papila, M., Haftka, R. T., Nishida, T., & Sheplak, M. Journal of Microelectromechanical Systems, 15(6):1632–1643, 2006.
doi  bibtex   
@Article{Papila2006a,
    author      = {Papila, Melih and Haftka, Raphael T. and Nishida, Toshikazu and Sheplak, Mark},
    title       = {Piezoresistive Microphone Design Pareto Optimization: Tradeoff Between Sensitivity and Noise Floor},
    doi         = {10.1109/JMEMS.2006.883884},
    journal     = {Journal of Microelectromechanical Systems},
    number      = {6},
    pages       = {1632--1643},
    volume      = {15},
    year        = {2006}
}

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