Plasma-based ion implantation and deposition: A review of physics, technology, and applications. Pelletier, J. & Anders, A. Plasma Science, IEEE Transactions on, 33(6):1944--1959, 2005. Paper bibtex @article{pelletier_plasma-based_2005,
title = {Plasma-based ion implantation and deposition: {A} review of physics, technology, and applications},
volume = {33},
shorttitle = {Plasma-based ion implantation and deposition},
url = {http://ieeexplore.ieee.org/xpls/abs_all.jsp?arnumber=1556679},
number = {6},
urldate = {2012-12-13TZ},
journal = {Plasma Science, IEEE Transactions on},
author = {Pelletier, J. and Anders, A.},
year = {2005},
pages = {1944--1959}
}
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