@inproceedings{
 title = {Design and fabrication of Si-diaphragm for ZnO-based MEMS acoustic sensor},
 type = {inproceedings},
 year = {2013},
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 author = {Prasad, Mahanth and Sahula, V and Khanna, V K},
 booktitle = {17th International Symposium on VLSI Design and Test, 2013}
}

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