@inproceedings{
 title = {Design and fabrication of Si-diaphragm for ZnO-based MEMS acoustic sensor},
 type = {inproceedings},
 year = {2013},
 institution = {Springer CICCS},
 id = {c0d000ab-9815-3fa9-ba21-0ee170f2b5c2},
 created = {2014-04-17T21:17:22.000Z},
 file_attached = {true},
 profile_id = {03d2ca17-6bde-3cfe-95de-fcbe4f21507b},
 last_modified = {2017-03-14T01:22:09.162Z},
 read = {false},
 starred = {false},
 authored = {true},
 confirmed = {true},
 hidden = {false},
 citation_key = {MahanthPrasad2013},
 source_type = {inproceedings},
 private_publication = {false},
 bibtype = {inproceedings},
 author = {Prasad, Mahanth and Sahula, V and Khanna, V K},
 booktitle = {17th International Symposium on VLSI Design and Test, 2013}
}

{"_id":"aktQ9GW73QKqQYtzE","bibbaseid":"prasad-sahula-khanna-designandfabricationofsidiaphragmforznobasedmemsacousticsensor-2013","author_short":["Prasad, M.","Sahula, V.","Khanna, V., K."],"bibdata":{"title":"Design and fabrication of Si-diaphragm for ZnO-based MEMS acoustic sensor","type":"inproceedings","year":"2013","institution":"Springer CICCS","id":"c0d000ab-9815-3fa9-ba21-0ee170f2b5c2","created":"2014-04-17T21:17:22.000Z","file_attached":"true","profile_id":"03d2ca17-6bde-3cfe-95de-fcbe4f21507b","last_modified":"2017-03-14T01:22:09.162Z","read":false,"starred":false,"authored":"true","confirmed":"true","hidden":false,"citation_key":"MahanthPrasad2013","source_type":"inproceedings","private_publication":false,"bibtype":"inproceedings","author":"Prasad, Mahanth and Sahula, V and Khanna, V K","booktitle":"17th International Symposium on VLSI Design and Test, 2013","bibtex":"@inproceedings{\n title = {Design and fabrication of Si-diaphragm for ZnO-based MEMS acoustic sensor},\n type = {inproceedings},\n year = {2013},\n institution = {Springer CICCS},\n id = {c0d000ab-9815-3fa9-ba21-0ee170f2b5c2},\n created = {2014-04-17T21:17:22.000Z},\n file_attached = {true},\n profile_id = {03d2ca17-6bde-3cfe-95de-fcbe4f21507b},\n last_modified = {2017-03-14T01:22:09.162Z},\n read = {false},\n starred = {false},\n authored = {true},\n confirmed = {true},\n hidden = {false},\n citation_key = {MahanthPrasad2013},\n source_type = {inproceedings},\n private_publication = {false},\n bibtype = {inproceedings},\n author = {Prasad, Mahanth and Sahula, V and Khanna, V K},\n booktitle = {17th International Symposium on VLSI Design and Test, 2013}\n}","author_short":["Prasad, M.","Sahula, V.","Khanna, V., K."],"urls":{"Paper":"https://bibbase.org/service/mendeley/03d2ca17-6bde-3cfe-95de-fcbe4f21507b/file/541d401b-8004-6aab-169a-74e638b035e3/2013-Design_and_fabrication_of_Si-diaphragm_for_ZnO-based_MEMS_acoustic_sensor.pdf.pdf"},"biburl":"https://bibbase.org/service/mendeley/03d2ca17-6bde-3cfe-95de-fcbe4f21507b","bibbaseid":"prasad-sahula-khanna-designandfabricationofsidiaphragmforznobasedmemsacousticsensor-2013","role":"author","metadata":{"authorlinks":{}}},"bibtype":"inproceedings","biburl":"https://bibbase.org/service/mendeley/03d2ca17-6bde-3cfe-95de-fcbe4f21507b","dataSources":["YNoDN2TgaRvNK6vy3","ya2CyA73rpZseyrZ8"],"keywords":[],"search_terms":["design","fabrication","diaphragm","zno","based","mems","acoustic","sensor","prasad","sahula","khanna"],"title":"Design and fabrication of Si-diaphragm for ZnO-based MEMS acoustic sensor","year":2013}