@inproceedings{
 title = {Zinc Oxide deposition and etching for MEMS acoustic sensor},
 type = {inproceedings},
 year = {2013},
 id = {ea47a74c-848e-3722-9817-202e57f2a56c},
 created = {2015-04-19T06:07:18.000Z},
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 last_modified = {2017-03-14T01:22:09.162Z},
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 starred = {false},
 authored = {true},
 confirmed = {true},
 hidden = {false},
 citation_key = {Prasad2013a},
 private_publication = {false},
 bibtype = {inproceedings},
 author = {Prasad, Mahanth and Sahula, Vineet (MNIT Jaipur) and Khanna, V. K.},
 booktitle = {Journal of Sensor Techniques & Applications}
}

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