{"_id":"y3w3WKMahTz7KJmoy","bibbaseid":"prasad-sahula-khanna-zincoxidedepositionandetchingformemsacousticsensor-2013","author_short":["Prasad, M.","Sahula, V. S.","Khanna, V. K."],"bibdata":{"bibtype":"article","type":"article","author":[{"propositions":[],"lastnames":["Prasad"],"firstnames":["Mahanth"],"suffixes":[]},{"propositions":[],"lastnames":["Sahula"],"firstnames":["Vineet","Sahula"],"suffixes":[]},{"propositions":[],"lastnames":["Khanna"],"firstnames":["V.","K."],"suffixes":[]}],"title":"Zinc Oxide deposition and etching for MEMS acoustic sensor","journal":"Journal of Sensor Techniques & Applications","year":"2013","owner":"Vineet","timestamp":"2016.08.21","bibtex":"@Article{prasad2013a,\r\n author = {Prasad, Mahanth and Sahula, Vineet Sahula and Khanna, V. K.},\r\n title = {Zinc Oxide deposition and etching for MEMS acoustic sensor},\r\n journal = {Journal of Sensor Techniques {\\&} Applications},\r\n year = {2013},\r\n owner = {Vineet},\r\n timestamp = {2016.08.21},\r\n}\r\n\r\n","author_short":["Prasad, M.","Sahula, V. S.","Khanna, V. K."],"key":"prasad2013a","id":"prasad2013a","bibbaseid":"prasad-sahula-khanna-zincoxidedepositionandetchingformemsacousticsensor-2013","role":"author","urls":{},"metadata":{"authorlinks":{}}},"bibtype":"article","biburl":"https://bibbase.org/network/files/sM7jHreBJqBTJiuKp","dataSources":["pSNhXMFJxYm9uTCNt","PTLrA9fS3hyN8EQmt","ya2CyA73rpZseyrZ8","2252seNhipfTmjEBQ","t6wpuLQ6zczqJP6ot"],"keywords":[],"search_terms":["zinc","oxide","deposition","etching","mems","acoustic","sensor","prasad","sahula","khanna"],"title":"Zinc Oxide deposition and etching for MEMS acoustic sensor","year":2013}