@inproceedings{
 title = {Design and mathematical model of a ZnO-based MEMS acoustic sensor},
 type = {inproceedings},
 year = {2012},
 pages = {85491D--1},
 volume = {8549},
 institution = {Proc. of SPIE},
 id = {e1b95c51-1f05-34be-a9ef-fd6bcb2e4cc3},
 created = {2014-04-17T21:17:22.000Z},
 file_attached = {true},
 profile_id = {03d2ca17-6bde-3cfe-95de-fcbe4f21507b},
 last_modified = {2017-03-14T01:22:09.162Z},
 read = {false},
 starred = {false},
 authored = {true},
 confirmed = {true},
 hidden = {false},
 citation_key = {Prasad2012a},
 source_type = {inproceedings},
 private_publication = {false},
 bibtype = {inproceedings},
 author = {Prasad, Mahanth and Yadav, R P and Sahula, V and Khanna, V K},
 booktitle = {16th International Workshop on Physics of Semiconductor Devices}
}

{"_id":"Bgii8mgr2ktEvPLgf","bibbaseid":"prasad-yadav-sahula-khanna-designandmathematicalmodelofaznobasedmemsacousticsensor-2012","author_short":["Prasad, M.","Yadav, R., P.","Sahula, V.","Khanna, V., K."],"bibdata":{"title":"Design and mathematical model of a ZnO-based MEMS acoustic sensor","type":"inproceedings","year":"2012","pages":"85491D--1","volume":"8549","institution":"Proc. of SPIE","id":"e1b95c51-1f05-34be-a9ef-fd6bcb2e4cc3","created":"2014-04-17T21:17:22.000Z","file_attached":"true","profile_id":"03d2ca17-6bde-3cfe-95de-fcbe4f21507b","last_modified":"2017-03-14T01:22:09.162Z","read":false,"starred":false,"authored":"true","confirmed":"true","hidden":false,"citation_key":"Prasad2012a","source_type":"inproceedings","private_publication":false,"bibtype":"inproceedings","author":"Prasad, Mahanth and Yadav, R P and Sahula, V and Khanna, V K","booktitle":"16th International Workshop on Physics of Semiconductor Devices","bibtex":"@inproceedings{\n title = {Design and mathematical model of a ZnO-based MEMS acoustic sensor},\n type = {inproceedings},\n year = {2012},\n pages = {85491D--1},\n volume = {8549},\n institution = {Proc. of SPIE},\n id = {e1b95c51-1f05-34be-a9ef-fd6bcb2e4cc3},\n created = {2014-04-17T21:17:22.000Z},\n file_attached = {true},\n profile_id = {03d2ca17-6bde-3cfe-95de-fcbe4f21507b},\n last_modified = {2017-03-14T01:22:09.162Z},\n read = {false},\n starred = {false},\n authored = {true},\n confirmed = {true},\n hidden = {false},\n citation_key = {Prasad2012a},\n source_type = {inproceedings},\n private_publication = {false},\n bibtype = {inproceedings},\n author = {Prasad, Mahanth and Yadav, R P and Sahula, V and Khanna, V K},\n booktitle = {16th International Workshop on Physics of Semiconductor Devices}\n}","author_short":["Prasad, M.","Yadav, R., P.","Sahula, V.","Khanna, V., K."],"urls":{"Paper":"https://bibbase.org/service/mendeley/03d2ca17-6bde-3cfe-95de-fcbe4f21507b/file/705d840e-b63d-776b-4863-3608b2b03d63/2012-Design_and_mathematical_model_of_a_ZnO-based_MEMS_acoustic_sensor.pdf.pdf"},"biburl":"https://bibbase.org/service/mendeley/03d2ca17-6bde-3cfe-95de-fcbe4f21507b","bibbaseid":"prasad-yadav-sahula-khanna-designandmathematicalmodelofaznobasedmemsacousticsensor-2012","role":"author","metadata":{"authorlinks":{}}},"bibtype":"inproceedings","biburl":"https://bibbase.org/service/mendeley/03d2ca17-6bde-3cfe-95de-fcbe4f21507b","dataSources":["YNoDN2TgaRvNK6vy3","ya2CyA73rpZseyrZ8"],"keywords":[],"search_terms":["design","mathematical","model","zno","based","mems","acoustic","sensor","prasad","yadav","sahula","khanna"],"title":"Design and mathematical model of a ZnO-based MEMS acoustic sensor","year":2012}