@article{
 title = {Design and simulation of double-spiral shape micro-heater for gas sensing applications},
 type = {article},
 year = {2011},
 keywords = {ANSYS simulation,Bulk-micromachining,Gas sensor,Microhotplate,Pt-heater},
 pages = {135-141},
 volume = {129},
 id = {23df6439-389e-33b0-8aa3-8c635ce14b20},
 created = {2015-12-27T16:51:05.000Z},
 file_attached = {false},
 profile_id = {03d2ca17-6bde-3cfe-95de-fcbe4f21507b},
 last_modified = {2018-08-04T08:25:26.136Z},
 read = {false},
 starred = {false},
 authored = {true},
 confirmed = {false},
 hidden = {false},
 citation_key = {Prasad2011a},
 folder_uuids = {eb474840-5125-4032-aab7-41ddd99e1ea7},
 private_publication = {false},
 abstract = {The paper presents the design and simulation of double spiral shape micro-heater using ANSYS 10.0 and MATLAB, which requires 12.5 mW-78.3 mW powers to create the temperature 181 °C-1002 °C for gas sensing applications. The results obtained from ANSYS simulation were verified using MATLAB Tool. A platinum-based bulk micro-machined hotplate of size 500 μm × 500 μm has been designed for fabrication as a multi-layer structure on a silicon substrate with thermal silicon dioxide as the supporting membrane, followed by LPCVD (Low pressure chemical vapor deposition) silicon nitride film. Gas sensing film (SnO2) will be deposited on the interdigitated Pt electrodes formed on the PECVD oxide layer. The temperature uniformity of microhotplate (as it is essential for better sensing mechanism) based on double spiral heater has been reported in this paper. To estimate the resistance of the Pt heater, a 2000 A° thick platinum film has been deposited by sputtering on silicon and its sheet resistance has been measured as 2.5 Ohm/□. We have used this value to calculate the resistance of Pt resistor, which was found 319 Ohm. © 2011 IFSA.},
 bibtype = {article},
 author = {Prasad, M. and Yadav, R.P. and Sahula, V. and Khanna, V.K.},
 journal = {Sensors and Transducers},
 number = {6}
}

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