Development of RF/microwave on-chip inductors using an organic micromachining process. Ramachandran, R. & Pham, A., -., H. IEEE Transactions on Advanced Packaging, 25(2):244-247, 5, 2002. abstract bibtex The design and development of a micromachined spiral inductor using an organic micromachining process are presented. The process utilizes an ultra-thick negative photoresist SU-8 to elevate an inductor structure above a substrate. The micromachined inductors have been designed and fabricated on solid and hollow ground planes to, investigate the feasibility for achieving high Q-factors. The experimental results demonstrate that a micromachined inductor integrated on a Si substrate achieves a Q-factor of 19.3 at 2.1 GHz.
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title = {Development of RF/microwave on-chip inductors using an organic micromachining process},
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abstract = {The design and development of a micromachined spiral inductor using an organic micromachining process are presented. The process utilizes an ultra-thick negative photoresist SU-8 to elevate an inductor structure above a substrate. The micromachined inductors have been designed and fabricated on solid and hollow ground planes to, investigate the feasibility for achieving high Q-factors. The experimental results demonstrate that a micromachined inductor integrated on a Si substrate achieves a Q-factor of 19.3 at 2.1 GHz.},
bibtype = {article},
author = {Ramachandran, R and Pham, A -. H},
journal = {IEEE Transactions on Advanced Packaging},
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