Process Mining Applied to the Test Process of Wafer Scanners in ASML. Rozinat, A., de Jong, I. S. M., Günther, C. W., & van der Aalst, W. M. P. IEEE Trans. Syst. Man Cybern. Part C, 39(4):474-479, 2009.
Link
Paper bibtex @article{journals/tsmc/RozinatJGA09,
added-at = {2020-05-21T00:00:00.000+0200},
author = {Rozinat, Anne and de Jong, Ivo S. M. and Günther, Christian W. and van der Aalst, Wil M. P.},
biburl = {https://www.bibsonomy.org/bibtex/26b42ef0ed34ac88fb58e7810d08530ca/dblp},
ee = {https://www.wikidata.org/entity/Q57005531},
interhash = {8262ef4f64062e308b98823f83147b8b},
intrahash = {6b42ef0ed34ac88fb58e7810d08530ca},
journal = {IEEE Trans. Syst. Man Cybern. Part C},
keywords = {dblp},
number = 4,
pages = {474-479},
timestamp = {2020-05-23T12:19:57.000+0200},
title = {Process Mining Applied to the Test Process of Wafer Scanners in ASML.},
url = {http://dblp.uni-trier.de/db/journals/tsmc/tsmcc39.html#RozinatJGA09},
volume = 39,
year = 2009
}
Downloads: 0
{"_id":"wZDjrd48wXANntS2H","bibbaseid":"rozinat-dejong-gnther-vanderaalst-processminingappliedtothetestprocessofwaferscannersinasml-2009","authorIDs":[],"author_short":["Rozinat, A.","de Jong, I. S. M.","Günther, C. W.","van der Aalst, W. M. P."],"bibdata":{"bibtype":"article","type":"article","added-at":"2020-05-21T00:00:00.000+0200","author":[{"propositions":[],"lastnames":["Rozinat"],"firstnames":["Anne"],"suffixes":[]},{"propositions":["de"],"lastnames":["Jong"],"firstnames":["Ivo","S.","M."],"suffixes":[]},{"propositions":[],"lastnames":["Günther"],"firstnames":["Christian","W."],"suffixes":[]},{"propositions":["van","der"],"lastnames":["Aalst"],"firstnames":["Wil","M.","P."],"suffixes":[]}],"biburl":"https://www.bibsonomy.org/bibtex/26b42ef0ed34ac88fb58e7810d08530ca/dblp","ee":"https://www.wikidata.org/entity/Q57005531","interhash":"8262ef4f64062e308b98823f83147b8b","intrahash":"6b42ef0ed34ac88fb58e7810d08530ca","journal":"IEEE Trans. Syst. Man Cybern. Part C","keywords":"dblp","number":"4","pages":"474-479","timestamp":"2020-05-23T12:19:57.000+0200","title":"Process Mining Applied to the Test Process of Wafer Scanners in ASML.","url":"http://dblp.uni-trier.de/db/journals/tsmc/tsmcc39.html#RozinatJGA09","volume":"39","year":"2009","bibtex":"@article{journals/tsmc/RozinatJGA09,\n added-at = {2020-05-21T00:00:00.000+0200},\n author = {Rozinat, Anne and de Jong, Ivo S. M. and Günther, Christian W. and van der Aalst, Wil M. P.},\n biburl = {https://www.bibsonomy.org/bibtex/26b42ef0ed34ac88fb58e7810d08530ca/dblp},\n ee = {https://www.wikidata.org/entity/Q57005531},\n interhash = {8262ef4f64062e308b98823f83147b8b},\n intrahash = {6b42ef0ed34ac88fb58e7810d08530ca},\n journal = {IEEE Trans. Syst. Man Cybern. Part C},\n keywords = {dblp},\n number = 4,\n pages = {474-479},\n timestamp = {2020-05-23T12:19:57.000+0200},\n title = {Process Mining Applied to the Test Process of Wafer Scanners in ASML.},\n url = {http://dblp.uni-trier.de/db/journals/tsmc/tsmcc39.html#RozinatJGA09},\n volume = 39,\n year = 2009\n}\n\n","author_short":["Rozinat, A.","de Jong, I. S. M.","Günther, C. W.","van der Aalst, W. M. P."],"key":"journals/tsmc/RozinatJGA09","id":"journals/tsmc/RozinatJGA09","bibbaseid":"rozinat-dejong-gnther-vanderaalst-processminingappliedtothetestprocessofwaferscannersinasml-2009","role":"author","urls":{"Link":"https://www.wikidata.org/entity/Q57005531","Paper":"http://dblp.uni-trier.de/db/journals/tsmc/tsmcc39.html#RozinatJGA09"},"keyword":["dblp"],"downloads":0},"bibtype":"article","biburl":"http://www.bibsonomy.org/bib/author/Gunther?items=1000","creationDate":"2020-11-19T14:18:48.563Z","downloads":0,"keywords":["dblp"],"search_terms":["process","mining","applied","test","process","wafer","scanners","asml","rozinat","de jong","günther","van der aalst"],"title":"Process Mining Applied to the Test Process of Wafer Scanners in ASML.","year":2009,"dataSources":["vx3tQbZepny2tNB7k"]}