Process Mining Applied to the Test Process of Wafer Scanners in ASML. Rozinat, A., de Jong, I. S. M., Günther, C. W., & van der Aalst, W. M. P. IEEE Trans. Syst. Man Cybern. Part C, 39(4):474-479, 2009.
Process Mining Applied to the Test Process of Wafer Scanners in ASML. [link]Link  Process Mining Applied to the Test Process of Wafer Scanners in ASML. [link]Paper  bibtex   
@article{journals/tsmc/RozinatJGA09,
  added-at = {2020-05-21T00:00:00.000+0200},
  author = {Rozinat, Anne and de Jong, Ivo S. M. and Günther, Christian W. and van der Aalst, Wil M. P.},
  biburl = {https://www.bibsonomy.org/bibtex/26b42ef0ed34ac88fb58e7810d08530ca/dblp},
  ee = {https://www.wikidata.org/entity/Q57005531},
  interhash = {8262ef4f64062e308b98823f83147b8b},
  intrahash = {6b42ef0ed34ac88fb58e7810d08530ca},
  journal = {IEEE Trans. Syst. Man Cybern. Part C},
  keywords = {dblp},
  number = 4,
  pages = {474-479},
  timestamp = {2020-05-23T12:19:57.000+0200},
  title = {Process Mining Applied to the Test Process of Wafer Scanners in ASML.},
  url = {http://dblp.uni-trier.de/db/journals/tsmc/tsmcc39.html#RozinatJGA09},
  volume = 39,
  year = 2009
}

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