@article{journals/tcad/SchecklerTPN93,
  added-at = {2016-03-18T00:00:00.000+0100},
  author = {Scheckler, Edward W. and Tam, Nelson N. and Pfau, Anton K. and Neureuther, Andrew R.},
  biburl = {http://www.bibsonomy.org/bibtex/2bf3d876651b34817f9960583a380db68/dblp},
  ee = {http://dx.doi.org/10.1109/43.240082},
  interhash = {b3dcc90fc1bff1cd4024eeebb9913647},
  intrahash = {bf3d876651b34817f9960583a380db68},
  journal = {IEEE Trans. on CAD of Integrated Circuits and Systems},
  keywords = {dblp},
  number = 9,
  pages = {1345-1356},
  timestamp = {2016-03-19T11:40:51.000+0100},
  title = {An efficient volume-removal algorithm for practical three-dimensional lithography simulation with experimental verification.},
  url = {http://dblp.uni-trier.de/db/journals/tcad/tcad12.html#SchecklerTPN93},
  volume = 12,
  year = 1993
}

{"_id":"k73fGnHumScnTttox","bibbaseid":"scheckler-tam-pfau-neureuther-anefficientvolumeremovalalgorithmforpracticalthreedimensionallithographysimulationwithexperimentalverification-1993","downloads":0,"creationDate":"2016-07-21T11:38:54.976Z","title":"An efficient volume-removal algorithm for practical three-dimensional lithography simulation with experimental verification.","author_short":["Scheckler, E. W.","Tam, N. N.","Pfau, A. K.","Neureuther, A. R."],"year":1993,"bibtype":"article","biburl":"http://www.bibsonomy.org/bib/author/Tam?items=1000","bibdata":{"bibtype":"article","type":"article","added-at":"2016-03-18T00:00:00.000+0100","author":[{"propositions":[],"lastnames":["Scheckler"],"firstnames":["Edward","W."],"suffixes":[]},{"propositions":[],"lastnames":["Tam"],"firstnames":["Nelson","N."],"suffixes":[]},{"propositions":[],"lastnames":["Pfau"],"firstnames":["Anton","K."],"suffixes":[]},{"propositions":[],"lastnames":["Neureuther"],"firstnames":["Andrew","R."],"suffixes":[]}],"biburl":"http://www.bibsonomy.org/bibtex/2bf3d876651b34817f9960583a380db68/dblp","ee":"http://dx.doi.org/10.1109/43.240082","interhash":"b3dcc90fc1bff1cd4024eeebb9913647","intrahash":"bf3d876651b34817f9960583a380db68","journal":"IEEE Trans. on CAD of Integrated Circuits and Systems","keywords":"dblp","number":"9","pages":"1345-1356","timestamp":"2016-03-19T11:40:51.000+0100","title":"An efficient volume-removal algorithm for practical three-dimensional lithography simulation with experimental verification.","url":"http://dblp.uni-trier.de/db/journals/tcad/tcad12.html#SchecklerTPN93","volume":"12","year":"1993","bibtex":"@article{journals/tcad/SchecklerTPN93,\n added-at = {2016-03-18T00:00:00.000+0100},\n author = {Scheckler, Edward W. and Tam, Nelson N. and Pfau, Anton K. and Neureuther, Andrew R.},\n biburl = {http://www.bibsonomy.org/bibtex/2bf3d876651b34817f9960583a380db68/dblp},\n ee = {http://dx.doi.org/10.1109/43.240082},\n interhash = {b3dcc90fc1bff1cd4024eeebb9913647},\n intrahash = {bf3d876651b34817f9960583a380db68},\n journal = {IEEE Trans. on CAD of Integrated Circuits and Systems},\n keywords = {dblp},\n number = 9,\n pages = {1345-1356},\n timestamp = {2016-03-19T11:40:51.000+0100},\n title = {An efficient volume-removal algorithm for practical three-dimensional lithography simulation with experimental verification.},\n url = {http://dblp.uni-trier.de/db/journals/tcad/tcad12.html#SchecklerTPN93},\n volume = 12,\n year = 1993\n}\n\n","author_short":["Scheckler, E. W.","Tam, N. N.","Pfau, A. K.","Neureuther, A. R."],"key":"journals/tcad/SchecklerTPN93","id":"journals/tcad/SchecklerTPN93","bibbaseid":"scheckler-tam-pfau-neureuther-anefficientvolumeremovalalgorithmforpracticalthreedimensionallithographysimulationwithexperimentalverification-1993","role":"author","urls":{"Link":"http://dx.doi.org/10.1109/43.240082","Paper":"http://dblp.uni-trier.de/db/journals/tcad/tcad12.html#SchecklerTPN93"},"keyword":["dblp"],"downloads":0},"search_terms":["efficient","volume","removal","algorithm","practical","three","dimensional","lithography","simulation","experimental","verification","scheckler","tam","pfau","neureuther"],"keywords":["dblp"],"authorIDs":[],"dataSources":["GinAz5S4xTcJmhpWm"]}