@article{journals/mr/ScholzHSLKB14,
  author = {Scholz, Philipp and Herfurth, Norbert and Sadowski, Michael and Lundquist, Ted R. and Kerst, Uwe and Boit, Christian},
  ee = {http://dx.doi.org/10.1016/j.microrel.2014.07.062},
  interhash = {b43d79a3d6b3c84e3d65b93348848958},
  intrahash = {6b4ef266f21e197a16b02e6d2c48ab1a},
  journal = {Microelectronics Reliability},
  number = {9-10},
  pages = {1794-1797},
  title = {Efficient and flexible Focused Ion Beam micromachining of Solid Immersion Lenses in various bulk semiconductor materials - An adaptive calibration algorithm.},
  url = {http://dblp.uni-trier.de/db/journals/mr/mr54.html#ScholzHSLKB14},
  volume = 54,
  year = 2014
}

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