Efficient and flexible Focused Ion Beam micromachining of Solid Immersion Lenses in various bulk semiconductor materials - An adaptive calibration algorithm. Scholz, P., Herfurth, N., Sadowski, M., Lundquist, T. R., Kerst, U., & Boit, C. Microelectronics Reliability, 54(9-10):1794-1797, 2014.
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Paper bibtex @article{journals/mr/ScholzHSLKB14,
author = {Scholz, Philipp and Herfurth, Norbert and Sadowski, Michael and Lundquist, Ted R. and Kerst, Uwe and Boit, Christian},
ee = {http://dx.doi.org/10.1016/j.microrel.2014.07.062},
interhash = {b43d79a3d6b3c84e3d65b93348848958},
intrahash = {6b4ef266f21e197a16b02e6d2c48ab1a},
journal = {Microelectronics Reliability},
number = {9-10},
pages = {1794-1797},
title = {Efficient and flexible Focused Ion Beam micromachining of Solid Immersion Lenses in various bulk semiconductor materials - An adaptive calibration algorithm.},
url = {http://dblp.uni-trier.de/db/journals/mr/mr54.html#ScholzHSLKB14},
volume = 54,
year = 2014
}
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{"_id":"yqZkK2f5fRWx4Wvye","bibbaseid":"scholz-herfurth-sadowski-lundquist-kerst-boit-efficientandflexiblefocusedionbeammicromachiningofsolidimmersionlensesinvariousbulksemiconductormaterialsanadaptivecalibrationalgorithm-2014","downloads":0,"creationDate":"2017-04-22T09:30:53.168Z","title":"Efficient and flexible Focused Ion Beam micromachining of Solid Immersion Lenses in various bulk semiconductor materials - An adaptive calibration algorithm.","author_short":["Scholz, P.","Herfurth, N.","Sadowski, M.","Lundquist, T. R.","Kerst, U.","Boit, C."],"year":2014,"bibtype":"article","biburl":"http://www.bibsonomy.org/bib/author/Kersting?items=1000","bibdata":{"bibtype":"article","type":"article","author":[{"propositions":[],"lastnames":["Scholz"],"firstnames":["Philipp"],"suffixes":[]},{"propositions":[],"lastnames":["Herfurth"],"firstnames":["Norbert"],"suffixes":[]},{"propositions":[],"lastnames":["Sadowski"],"firstnames":["Michael"],"suffixes":[]},{"propositions":[],"lastnames":["Lundquist"],"firstnames":["Ted","R."],"suffixes":[]},{"propositions":[],"lastnames":["Kerst"],"firstnames":["Uwe"],"suffixes":[]},{"propositions":[],"lastnames":["Boit"],"firstnames":["Christian"],"suffixes":[]}],"ee":"http://dx.doi.org/10.1016/j.microrel.2014.07.062","interhash":"b43d79a3d6b3c84e3d65b93348848958","intrahash":"6b4ef266f21e197a16b02e6d2c48ab1a","journal":"Microelectronics Reliability","number":"9-10","pages":"1794-1797","title":"Efficient and flexible Focused Ion Beam micromachining of Solid Immersion Lenses in various bulk semiconductor materials - An adaptive calibration algorithm.","url":"http://dblp.uni-trier.de/db/journals/mr/mr54.html#ScholzHSLKB14","volume":"54","year":"2014","bibtex":"@article{journals/mr/ScholzHSLKB14,\n author = {Scholz, Philipp and Herfurth, Norbert and Sadowski, Michael and Lundquist, Ted R. and Kerst, Uwe and Boit, Christian},\n ee = {http://dx.doi.org/10.1016/j.microrel.2014.07.062},\n interhash = {b43d79a3d6b3c84e3d65b93348848958},\n intrahash = {6b4ef266f21e197a16b02e6d2c48ab1a},\n journal = {Microelectronics Reliability},\n number = {9-10},\n pages = {1794-1797},\n title = {Efficient and flexible Focused Ion Beam micromachining of Solid Immersion Lenses in various bulk semiconductor materials - An adaptive calibration algorithm.},\n url = {http://dblp.uni-trier.de/db/journals/mr/mr54.html#ScholzHSLKB14},\n volume = 54,\n year = 2014\n}\n\n","author_short":["Scholz, P.","Herfurth, N.","Sadowski, M.","Lundquist, T. R.","Kerst, U.","Boit, C."],"key":"journals/mr/ScholzHSLKB14","id":"journals/mr/ScholzHSLKB14","bibbaseid":"scholz-herfurth-sadowski-lundquist-kerst-boit-efficientandflexiblefocusedionbeammicromachiningofsolidimmersionlensesinvariousbulksemiconductormaterialsanadaptivecalibrationalgorithm-2014","role":"author","urls":{"Link":"http://dx.doi.org/10.1016/j.microrel.2014.07.062","Paper":"http://dblp.uni-trier.de/db/journals/mr/mr54.html#ScholzHSLKB14"},"downloads":0},"search_terms":["efficient","flexible","focused","ion","beam","micromachining","solid","immersion","lenses","various","bulk","semiconductor","materials","adaptive","calibration","algorithm","scholz","herfurth","sadowski","lundquist","kerst","boit"],"keywords":[],"authorIDs":[],"dataSources":["kXwgAftSGDLuraW8B"]}