Scalable fabrication of coupled NV center - photonic crystal cavity systems by self-aligned N ion implantation. Schröder, T., Walsh, M., Zheng, J., Mouradian, S., Li, L., Malladi, G., Bakhru, H., Lu, M., Stein, A., Heuck, M., & Englund, D. Optical Materials Express, 7(5):1514–1524, May, 2017. Publisher: Optica Publishing Group
Scalable fabrication of coupled NV center - photonic crystal cavity systems by self-aligned N ion implantation [link]Paper  doi  abstract   bibtex   
Towards building large-scale integrated photonic systems for quantum information processing, spatial and spectral alignment of single quantum systems to photonic nanocavities is required. Here, we demonstrate spatially targeted implantation of nitrogen vacancy (NV) centers into the mode maximum of 2-d diamond photonic crystal cavities with quality factors up to 8000, achieving an average of 1.1 ± 0.2 NVs per cavity. Nearly all NV-cavity systems have significant emission intensity enhancement, reaching a cavity-fed spectrally selective intensity enhancement, Fint, of up to 93. Although spatial NV-cavity overlap is nearly guaranteed within about 40 nm, spectral tuning of the NV’s zero-phonon-line (ZPL) is still necessary after fabrication. To demonstrate spectral control, we temperature tune a cavity into an NV ZPL, yielding FintZPL~5 at cryogenic temperatures.
@article{schroder_scalable_2017,
	title = {Scalable fabrication of coupled {NV} center - photonic crystal cavity systems by self-aligned {N} ion implantation},
	volume = {7},
	copyright = {\&\#169; 2017 Optical Society of America},
	issn = {2159-3930},
	url = {https://opg.optica.org/ome/abstract.cfm?uri=ome-7-5-1514},
	doi = {10.1364/OME.7.001514},
	abstract = {Towards building large-scale integrated photonic systems for quantum information processing, spatial and spectral alignment of single quantum systems to photonic nanocavities is required. Here, we demonstrate spatially targeted implantation of nitrogen vacancy (NV) centers into the mode maximum of 2-d diamond photonic crystal cavities with quality factors up to 8000, achieving an average of 1.1 ± 0.2 NVs per cavity. Nearly all NV-cavity systems have significant emission intensity enhancement, reaching a cavity-fed spectrally selective intensity enhancement, Fint, of up to 93. Although spatial NV-cavity overlap is nearly guaranteed within about 40 nm, spectral tuning of the NV’s zero-phonon-line (ZPL) is still necessary after fabrication. To demonstrate spectral control, we temperature tune a cavity into an NV ZPL, yielding FintZPL{\textasciitilde}5 at cryogenic temperatures.},
	language = {EN},
	number = {5},
	urldate = {2022-08-03},
	journal = {Optical Materials Express},
	author = {Schröder, T. and Walsh, M. and Zheng, J. and Mouradian, S. and Li, L. and Malladi, G. and Bakhru, H. and Lu, M. and Stein, A. and Heuck, M. and Englund, D.},
	month = may,
	year = {2017},
	note = {Publisher: Optica Publishing Group},
	pages = {1514--1524},
}

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