@Article{Schroettner_2006_16374,
  author = {Schroettner, H and Schmied, M and Scherer, S},
 journal = {Microchimica Acta},
 number = {1-2},
 pages = {279--284},
 publisher = {Springer},
 title = {Comparison of {3D} surface reconstruction data from certified depth standards obtained by SEM and an infinite focus measurement machine (IFM)},
 volume = {155},
 year = {2006},
 title_with_no_special_chars = {Comparison of 3D surface reconstruction data from certified depth standards obtained by SEM and an infinite focus measurement machine IFM}
}

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