Fast, Optics-Free Extraction of Interface Trap and Subgap DOS in Amorphous Oxide TFTs Using Single Pulse Charge Pumping. Shih, C., Islam, M. M. F., Niu, C., Jang, H., Lee, S., Huh, I., Jeong, C., Ye, P. D., & Alam, M. A. In 2026 IEEE International Reliability Physics Symposium (IRPS), pages 1–6, March, 2026. doi abstract bibtex Next-generation ultra-thin floating body (Si/Oxide/MoS.) transistors inherently contain a significant number of interface and bulk defects that alter device performance/reliability. Recent studies show that sub-bandgap (SBG) states cause subthreshold swing (S S) saturation at cryogenic temperatures, impacting cryogenic applications in aerospace electronics and quantum computing. In this work, we present a fast, optics-free methodology using single pulse charge pumping (SPCP) to extract interface trap density (N_\ text it ) and SBG density of states (DOS) in ALD-grown ultrathin amorphous-oxide TFTs. First, we validate the high stability and repeatability of SPCP by multi-pulse charge pumping (MPCP). Second, we embed the SPCP-extracted N_\ text it into a physics-based PBTI model, improving the threshold voltage shift (\ Delta V_\ text th ) predictions. Finally, we reconstruct SBG-DOS using an SPCP-based extraction framework with hybrid density functional theory (DFT) calculation. We show that post-annealing reduces SBG-DOS in both \ textIn_2 \ mathrmO_3 and IGZO, and the SBG-DOS comprises band tail states and oxygen-vacancy-related deep states (\ textVo\textasciicircum 2+ and \ textVo\textasciicircum 0). Overall, our work demonstrates that the SPCP framework enables rapid and reliable N_\ textit / DOS metrology for next-generation transistors.
@inproceedings{shihFastOpticsFreeExtraction2026,
title = {Fast, {{Optics-Free Extraction}} of {{Interface Trap}} and {{Subgap DOS}} in {{Amorphous Oxide TFTs Using Single Pulse Charge Pumping}}},
booktitle = {2026 {{IEEE International Reliability Physics Symposium}} ({{IRPS}})},
author = {Shih, Chun-An and Islam, Mir Md Fahimul and Niu, Chang and Jang, Hyeongjun and Lee, Sumi and Huh, In and Jeong, Changwook and Ye, Peide D. and Alam, Muhammad A.},
year = 2026,
month = mar,
pages = {1--6},
issn = {1938-1891},
doi = {10.1109/IRPS61424.2026.11499244},
urldate = {2026-05-14},
abstract = {Next-generation ultra-thin floating body (Si/Oxide/MoS.) transistors inherently contain a significant number of interface and bulk defects that alter device performance/reliability. Recent studies show that sub-bandgap (SBG) states cause subthreshold swing (S S) saturation at cryogenic temperatures, impacting cryogenic applications in aerospace electronics and quantum computing. In this work, we present a fast, optics-free methodology using single pulse charge pumping (SPCP) to extract interface trap density (N\_\textbackslash text it ) and SBG density of states (DOS) in ALD-grown ultrathin amorphous-oxide TFTs. First, we validate the high stability and repeatability of SPCP by multi-pulse charge pumping (MPCP). Second, we embed the SPCP-extracted N\_\textbackslash text it into a physics-based PBTI model, improving the threshold voltage shift (\textbackslash Delta V\_\textbackslash text th ) predictions. Finally, we reconstruct SBG-DOS using an SPCP-based extraction framework with hybrid density functional theory (DFT) calculation. We show that post-annealing reduces SBG-DOS in both \textbackslash textIn\_2 \textbackslash mathrmO\_3 and IGZO, and the SBG-DOS comprises band tail states and oxygen-vacancy-related deep states (\textbackslash textVo\textasciicircum 2+ and \textbackslash textVo\textasciicircum 0). Overall, our work demonstrates that the SPCP framework enables rapid and reliable N\_\textbackslash textit / DOS metrology for next-generation transistors.},
keywords = {Aerospace electronics,Charge pumping (CP),Charge pumps,Circuits,Circuits and systems,Contacts,Density functional theory (DFT) calculation,Diodes,Frequency modulation,Integrated circuits,Light emitting diodes,Oxide transistor,Radio broadcasting,Single pulse charge pumping (SPCP),Sub-bandgap density of states}
}
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Recent studies show that sub-bandgap (SBG) states cause subthreshold swing (S S) saturation at cryogenic temperatures, impacting cryogenic applications in aerospace electronics and quantum computing. In this work, we present a fast, optics-free methodology using single pulse charge pumping (SPCP) to extract interface trap density (N_\\ text it ) and SBG density of states (DOS) in ALD-grown ultrathin amorphous-oxide TFTs. First, we validate the high stability and repeatability of SPCP by multi-pulse charge pumping (MPCP). Second, we embed the SPCP-extracted N_\\ text it into a physics-based PBTI model, improving the threshold voltage shift (\\ Delta V_\\ text th ) predictions. Finally, we reconstruct SBG-DOS using an SPCP-based extraction framework with hybrid density functional theory (DFT) calculation. 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Recent studies show that sub-bandgap (SBG) states cause subthreshold swing (S S) saturation at cryogenic temperatures, impacting cryogenic applications in aerospace electronics and quantum computing. In this work, we present a fast, optics-free methodology using single pulse charge pumping (SPCP) to extract interface trap density (N\\_\\textbackslash text it ) and SBG density of states (DOS) in ALD-grown ultrathin amorphous-oxide TFTs. First, we validate the high stability and repeatability of SPCP by multi-pulse charge pumping (MPCP). Second, we embed the SPCP-extracted N\\_\\textbackslash text it into a physics-based PBTI model, improving the threshold voltage shift (\\textbackslash Delta V\\_\\textbackslash text th ) predictions. Finally, we reconstruct SBG-DOS using an SPCP-based extraction framework with hybrid density functional theory (DFT) calculation. 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