Photo-CVD process for ultra thin SiO2 films. Sánchez, V., Munguía, J., & Estrada, M. Microelectronics Reliability, 44(5):885-888, 2004.
Photo-CVD process for ultra thin SiO2 films. [link]Link  Photo-CVD process for ultra thin SiO2 films. [link]Paper  bibtex   
@article{journals/mr/SanchezME04,
  added-at = {2016-01-29T00:00:00.000+0100},
  author = {Sánchez, V. and Munguía, J. and Estrada, Magali},
  biburl = {http://www.bibsonomy.org/bibtex/28ad54b1060725d1f2e3ca540b02f81b8/dblp},
  ee = {http://dx.doi.org/10.1016/j.microrel.2004.02.003},
  interhash = {3de8ea0c6f0dfc86195dd022178001ab},
  intrahash = {8ad54b1060725d1f2e3ca540b02f81b8},
  journal = {Microelectronics Reliability},
  keywords = {dblp},
  number = 5,
  pages = {885-888},
  timestamp = {2016-01-30T11:36:07.000+0100},
  title = {Photo-CVD process for ultra thin SiO2 films.},
  url = {http://dblp.uni-trier.de/db/journals/mr/mr44.html#SanchezME04},
  volume = 44,
  year = 2004
}

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