Fiber optic MEMS pressure sensors based on evanescent field interaction. Tabib-Azar, M., Sutapun, B., & Glawe, D. In Miniaturized Systems with Micro-Optics and Micromechanics III, volume 3276, pages 135–146, 1998. SPIE. bibtex @inproceedings{tabib1998fiber,
title={Fiber optic MEMS pressure sensors based on evanescent field interaction},
author={Tabib-Azar, Massood and Sutapun, Boonsong and Glawe, Diana},
booktitle={Miniaturized Systems with Micro-Optics and Micromechanics III},
volume={3276},
pages={135--146},
year={1998},
organization={SPIE}
}
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