Fiber optic MEMS pressure sensors based on evanescent field interaction. Tabib-Azar, M., Sutapun, B., & Glawe, D. In Miniaturized Systems with Micro-Optics and Micromechanics III, volume 3276, pages 135–146, 1998. SPIE.
bibtex   
@inproceedings{tabib1998fiber,
  title={Fiber optic MEMS pressure sensors based on evanescent field interaction},
  author={Tabib-Azar, Massood and Sutapun, Boonsong and Glawe, Diana},
  booktitle={Miniaturized Systems with Micro-Optics and Micromechanics III},
  volume={3276},
  pages={135--146},
  year={1998},
  organization={SPIE}
}

Downloads: 0