MOEM pressure and other physical sensors using photon tunneling and optical evanescent fields with exponential sensitivities and excellent stabilities. Tabib-Azar, M. & Sutapun, B. In Microelectronic Structures and MEMS for Optical Processing IV, volume 3513, pages 210–222, 1998. SPIE.
bibtex   
@inproceedings{tabib1998moem,
  title={MOEM pressure and other physical sensors using photon tunneling and optical evanescent fields with exponential sensitivities and excellent stabilities},
  author={Tabib-Azar, Massood and Sutapun, Boonsong},
  booktitle={Microelectronic Structures and MEMS for Optical Processing IV},
  volume={3513},
  pages={210--222},
  year={1998},
  organization={SPIE}
}

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