Novel highly scalable and very high torque micromotor for MEMS and MOEMS applications using the mechanical rectification of oscillatory motion. Tabib-Azar, M., Sutapun, B., & Motamedi, M E. In Miniaturized Systems with Micro-Optics and Micromechanics III, volume 3276, pages 271–279, 1998. SPIE.
bibtex   
@inproceedings{tabib1998novel,
  title={Novel highly scalable and very high torque micromotor for MEMS and MOEMS applications using the mechanical rectification of oscillatory motion},
  author={Tabib-Azar, Massood and Sutapun, Boonsong and Motamedi, M Edward},
  booktitle={Miniaturized Systems with Micro-Optics and Micromechanics III},
  volume={3276},
  pages={271--279},
  year={1998},
  organization={SPIE}
}

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