Infrared spectroscopy and X-ray diffraction studies on the crystallographic evolution of La2O3 films upon annealing (vol 85, pg 2411, 2008). Tsoutsou, D., Scarel, G., Debernardi, A., Capelli, S. C., Volkos, S. N., Lamagna, L., Schamm, S., Coulon, P. E., & Fanciulli, M. Microelectronic Engineering, 86(10):2138--2138, October, 2009. doi bibtex @article{ tsoutsou_infrared_2009,
title = {Infrared spectroscopy and X-ray diffraction studies on the crystallographic evolution of {La2O3} films upon annealing (vol 85, pg 2411, 2008)},
volume = {86},
issn = {0167-9317},
doi = {10.1016/j.mee.2008.12.062},
language = {English},
number = {10},
journal = {Microelectronic Engineering},
author = {Tsoutsou, D. and Scarel, G. and Debernardi, A. and Capelli, S. C. and Volkos, S. N. and Lamagna, L. and Schamm, S. and Coulon, P. E. and Fanciulli, M.},
month = {October},
year = {2009},
pages = {2138--2138}
}
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