Surface modification of micromachined silicon filters. Wang, Y. & Ferrari, M. Journal of Materials Science, 35(19):4923–4930, October, 2000. Publisher: Kluwer Academic Publishers![Surface modification of micromachined silicon filters [link]](https://bibbase.org/img/filetypes/link.svg "link")
Paper doi bibtex @article{Wang2000,
title = {Surface modification of micromachined silicon filters},
volume = {35},
issn = {1573-4803},
url = {http://link.springer.com/article/10.1023/A%3A1004830408749},
doi = {10.1023/A:1004830408749},
language = {en},
number = {19},
urldate = {2014-01-18},
journal = {Journal of Materials Science},
author = {Wang, Yuchun and Ferrari, Mauro},
month = oct,
year = {2000},
note = {Publisher: Kluwer Academic Publishers},
pages = {4923--4930},
}
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{"_id":"Tze79a2QFx6wQJs4J","bibbaseid":"wang-ferrari-surfacemodificationofmicromachinedsiliconfilters-2000","author_short":["Wang, Y.","Ferrari, M."],"bibdata":{"bibtype":"article","type":"article","title":"Surface modification of micromachined silicon filters","volume":"35","issn":"1573-4803","url":"http://link.springer.com/article/10.1023/A%3A1004830408749","doi":"10.1023/A:1004830408749","language":"en","number":"19","urldate":"2014-01-18","journal":"Journal of Materials Science","author":[{"propositions":[],"lastnames":["Wang"],"firstnames":["Yuchun"],"suffixes":[]},{"propositions":[],"lastnames":["Ferrari"],"firstnames":["Mauro"],"suffixes":[]}],"month":"October","year":"2000","note":"Publisher: Kluwer Academic Publishers","pages":"4923–4930","bibtex":"@article{Wang2000,\n\ttitle = {Surface modification of micromachined silicon filters},\n\tvolume = {35},\n\tissn = {1573-4803},\n\turl = {http://link.springer.com/article/10.1023/A%3A1004830408749},\n\tdoi = {10.1023/A:1004830408749},\n\tlanguage = {en},\n\tnumber = {19},\n\turldate = {2014-01-18},\n\tjournal = {Journal of Materials Science},\n\tauthor = {Wang, Yuchun and Ferrari, Mauro},\n\tmonth = oct,\n\tyear = {2000},\n\tnote = {Publisher: Kluwer Academic Publishers},\n\tpages = {4923--4930},\n}\n\n\n\n","author_short":["Wang, Y.","Ferrari, M."],"key":"Wang2000","id":"Wang2000","bibbaseid":"wang-ferrari-surfacemodificationofmicromachinedsiliconfilters-2000","role":"author","urls":{"Paper":"http://link.springer.com/article/10.1023/A%3A1004830408749"},"metadata":{"authorlinks":{}},"html":""},"bibtype":"article","biburl":"https://bibbase.org/zotero/daniel.lee.manchester","dataSources":["8P52wdkZ6whW3tzKG"],"keywords":[],"search_terms":["surface","modification","micromachined","silicon","filters","wang","ferrari"],"title":"Surface modification of micromachined silicon filters","year":2000}