Atomic-level detection by X-ray microanalysis in the analytical electron microscope. Watanabe, M & Williams, D. Ultramicroscopy, 78(1-4):89–101, June, 1999. 00000![Atomic-level detection by X-ray microanalysis in the analytical electron microscope [link]](https://bibbase.org/img/filetypes/link.svg "link")
Paper doi abstract bibtex Experimental measurements and calculations have demonstrated the detecton of 2 atoms, and the feasibility of detecting single atoms, in the analysis volume of thin specimens using X-ray energy-dispersive spectrometry (XEDS). The use of a 300 kV VG HB 603 "eld-emission gun analytical electron microscope, with the highest possible X-ray collection e\$ciency is required. Experiments with the only available thin-"lm standard (NIST standard reference material 2063) indicate that, even when seeking relatively high atomic number elements in a low atomic number matrix, specimen thickness (101 nm in this case) limits attempts to detect single atoms. Comparison of simulated and experimental spectra con"rm the need for thin (&10 nm) specimens and the validity of the Goldsteinp̌hantom{\{}\}Romigp̌hantom{\{}\}Michael equation de"ning the detection limit. Using 10 nm foils of homogenized Cup̌hantom{\{}\}0.12 wt% Mn alloys it is shown that detection limits of 2 Mn atoms can be achieved with a 99% con"dence limit. The principal instrumental factor that controls the detection limit is the XEDS detector count rate rather than the detector resolution. 1999 Published by Elsevier Science B.V. All rights reserved.
@article{watanabe_atomic-level_1999,
title = {Atomic-level detection by {X}-ray microanalysis in the analytical electron microscope},
volume = {78},
issn = {03043991},
url = {http://linkinghub.elsevier.com/retrieve/pii/S0304399199000157},
doi = {10/br4df8},
abstract = {Experimental measurements and calculations have demonstrated the detecton of 2 atoms, and the feasibility of detecting single atoms, in the analysis volume of thin specimens using X-ray energy-dispersive spectrometry (XEDS). The use of a 300 kV VG HB 603 "eld-emission gun analytical electron microscope, with the highest possible X-ray collection e\$ciency is required. Experiments with the only available thin-"lm standard (NIST standard reference material 2063) indicate that, even when seeking relatively high atomic number elements in a low atomic number matrix, specimen thickness (101 nm in this case) limits attempts to detect single atoms. Comparison of simulated and experimental spectra con"rm the need for thin (\&10 nm) specimens and the validity of the Goldstein\vphantom{\{}\}Romig\vphantom{\{}\}Michael equation de"ning the detection limit. Using 10 nm foils of homogenized Cu\vphantom{\{}\}0.12 wt\% Mn alloys it is shown that detection limits of 2 Mn atoms can be achieved with a 99\% con"dence limit. The principal instrumental factor that controls the detection limit is the XEDS detector count rate rather than the detector resolution. 1999 Published by Elsevier Science B.V. All rights reserved.},
language = {en},
number = {1-4},
urldate = {2019-01-06},
journal = {Ultramicroscopy},
author = {Watanabe, M and Williams, D.B},
month = jun,
year = {1999},
note = {00000},
pages = {89--101},
}
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{"_id":"hvghgKoiEJgd3yDrw","bibbaseid":"watanabe-williams-atomicleveldetectionbyxraymicroanalysisintheanalyticalelectronmicroscope-1999","author_short":["Watanabe, M","Williams, D."],"bibdata":{"bibtype":"article","type":"article","title":"Atomic-level detection by X-ray microanalysis in the analytical electron microscope","volume":"78","issn":"03043991","url":"http://linkinghub.elsevier.com/retrieve/pii/S0304399199000157","doi":"10/br4df8","abstract":"Experimental measurements and calculations have demonstrated the detecton of 2 atoms, and the feasibility of detecting single atoms, in the analysis volume of thin specimens using X-ray energy-dispersive spectrometry (XEDS). The use of a 300 kV VG HB 603 \"eld-emission gun analytical electron microscope, with the highest possible X-ray collection e\\$ciency is required. Experiments with the only available thin-\"lm standard (NIST standard reference material 2063) indicate that, even when seeking relatively high atomic number elements in a low atomic number matrix, specimen thickness (101 nm in this case) limits attempts to detect single atoms. Comparison of simulated and experimental spectra con\"rm the need for thin (&10 nm) specimens and the validity of the Goldsteinp̌hantom{\\{}\\}Romigp̌hantom{\\{}\\}Michael equation de\"ning the detection limit. Using 10 nm foils of homogenized Cup̌hantom{\\{}\\}0.12 wt% Mn alloys it is shown that detection limits of 2 Mn atoms can be achieved with a 99% con\"dence limit. The principal instrumental factor that controls the detection limit is the XEDS detector count rate rather than the detector resolution. 1999 Published by Elsevier Science B.V. All rights reserved.","language":"en","number":"1-4","urldate":"2019-01-06","journal":"Ultramicroscopy","author":[{"propositions":[],"lastnames":["Watanabe"],"firstnames":["M"],"suffixes":[]},{"propositions":[],"lastnames":["Williams"],"firstnames":["D.B"],"suffixes":[]}],"month":"June","year":"1999","note":"00000","pages":"89–101","bibtex":"@article{watanabe_atomic-level_1999,\n\ttitle = {Atomic-level detection by {X}-ray microanalysis in the analytical electron microscope},\n\tvolume = {78},\n\tissn = {03043991},\n\turl = {http://linkinghub.elsevier.com/retrieve/pii/S0304399199000157},\n\tdoi = {10/br4df8},\n\tabstract = {Experimental measurements and calculations have demonstrated the detecton of 2 atoms, and the feasibility of detecting single atoms, in the analysis volume of thin specimens using X-ray energy-dispersive spectrometry (XEDS). The use of a 300 kV VG HB 603 \"eld-emission gun analytical electron microscope, with the highest possible X-ray collection e\\$ciency is required. Experiments with the only available thin-\"lm standard (NIST standard reference material 2063) indicate that, even when seeking relatively high atomic number elements in a low atomic number matrix, specimen thickness (101 nm in this case) limits attempts to detect single atoms. Comparison of simulated and experimental spectra con\"rm the need for thin (\\&10 nm) specimens and the validity of the Goldstein\\vphantom{\\{}\\}Romig\\vphantom{\\{}\\}Michael equation de\"ning the detection limit. Using 10 nm foils of homogenized Cu\\vphantom{\\{}\\}0.12 wt\\% Mn alloys it is shown that detection limits of 2 Mn atoms can be achieved with a 99\\% con\"dence limit. The principal instrumental factor that controls the detection limit is the XEDS detector count rate rather than the detector resolution. 1999 Published by Elsevier Science B.V. All rights reserved.},\n\tlanguage = {en},\n\tnumber = {1-4},\n\turldate = {2019-01-06},\n\tjournal = {Ultramicroscopy},\n\tauthor = {Watanabe, M and Williams, D.B},\n\tmonth = jun,\n\tyear = {1999},\n\tnote = {00000},\n\tpages = {89--101},\n}\n\n","author_short":["Watanabe, M","Williams, D."],"key":"watanabe_atomic-level_1999","id":"watanabe_atomic-level_1999","bibbaseid":"watanabe-williams-atomicleveldetectionbyxraymicroanalysisintheanalyticalelectronmicroscope-1999","role":"author","urls":{"Paper":"http://linkinghub.elsevier.com/retrieve/pii/S0304399199000157"},"metadata":{"authorlinks":{}}},"bibtype":"article","biburl":"https://bibbase.org/zotero/ricounet67","dataSources":["rx3H6duFmTt3xD5yy"],"keywords":[],"search_terms":["atomic","level","detection","ray","microanalysis","analytical","electron","microscope","watanabe","williams"],"title":"Atomic-level detection by X-ray microanalysis in the analytical electron microscope","year":1999}