Response of electrostatically actuated flexible mems structures to the onset of low-velocity contact. Wilcox, B., Dankowicz, H., & Lacarbonara, W. 2009.
Response of electrostatically actuated flexible mems structures to the onset of low-velocity contact [link]Paper  doi  bibtex   
@CONFERENCE{Wilcox20091777,
author={Wilcox, B. and Dankowicz, H. and Lacarbonara, W.},
title={Response of electrostatically actuated flexible mems structures to the onset of low-velocity contact},
journal={Proceedings of the ASME Design Engineering Technical Conference},
year={2009},
volume={4},
number={PARTS A, B AND C},
pages={1777-1786},
doi={10.1115/DETC2009-87011},
url={https://www.scopus.com/inward/record.uri?eid=2-s2.0-82155168180&doi=10.1115%2fDETC2009-87011&partnerID=40&md5=13e8013c885b8b340da25f0a6a2538bb},
document_type={Conference Paper},
source={Scopus},
}

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