Quantitative X-ray Analysis. Williams, D. B. & Carter, C. B. In Williams, D. B. & Carter, C. B., editors, Transmission Electron Microscopy: A Textbook for Materials Science, pages 639–662. Springer US, Boston, MA, 2009.
Quantitative X-ray Analysis [link]Paper  doi  abstract   bibtex   
Now you’ve got an idea of how to acquire XEDS spectra and images from thin foils. You understand what factors limit the useful information they may contain and what false and misleading effects may arise. Also you know how to be very sure that a certain characteristic peak is due to the presence of a certain element and the occasions when you may not be so confident. Having obtained a spectrum or image that is qualitatively interpretable, it turns out to be a remarkably simple procedure to convert that information into quantitative data about the distribution of elements in your specimen; this is what we describe in this chapter.
@incollection{williams_quantitative_2009,
	address = {Boston, MA},
	title = {Quantitative {X}-ray {Analysis}},
	isbn = {978-0-387-76501-3},
	url = {https://doi.org/10.1007/978-0-387-76501-3_35},
	abstract = {Now you’ve got an idea of how to acquire XEDS spectra and images from thin foils. You understand what factors limit the useful information they may contain and what false and misleading effects may arise. Also you know how to be very sure that a certain characteristic peak is due to the presence of a certain element and the occasions when you may not be so confident. Having obtained a spectrum or image that is qualitatively interpretable, it turns out to be a remarkably simple procedure to convert that information into quantitative data about the distribution of elements in your specimen; this is what we describe in this chapter.},
	language = {en},
	urldate = {2021-09-02},
	booktitle = {Transmission {Electron} {Microscopy}: {A} {Textbook} for {Materials} {Science}},
	publisher = {Springer US},
	author = {Williams, David B. and Carter, C. Barry},
	editor = {Williams, David B. and Carter, C. Barry},
	year = {2009},
	doi = {10.1007/978-0-387-76501-3_35},
	keywords = {Absorption Path Length, Bulk Specimen, Fluorescence Correction, Ionization Cross Section, Thin Specimen},
	pages = {639--662},
}

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