X-ray Spectrometry. Williams, D. B. & Carter, C. B. In Williams, D. B. & Carter, C. B., editors, Transmission Electron Microscopy: A Textbook for Materials Science, volume 32, pages 581–603. Springer US, Boston, MA, 2009.
X-ray Spectrometry [link]Paper  doi  abstract   bibtex   
To make use of the X-rays generated when the beam strikes the specimen, we have to detect them and identify from which element they originated. This is accomplished by X-ray spectrometry, which is one way to transform the TEM into a far more powerful instrument, called an analytical electron microscope (AEM). Currently, the only commercial spectrometer that we use on theTEM is an X-ray energy-dispersive spectrometer (XEDS), which uses a Si semiconductor detector or sometimes a Ge detector. New detector technologies are emerging, which we’ll describe briefly. While some of these may render the Si detector obsolete, we’ll nevertheless emphasize this particular detector.
@incollection{williams_x-ray_2009,
	address = {Boston, MA},
	title = {X-ray {Spectrometry}},
	volume = {32},
	isbn = {978-0-387-76501-3},
	url = {https://doi.org/10.1007/978-0-387-76501-3_32},
	abstract = {To make use of the X-rays generated when the beam strikes the specimen, we have to detect them and identify from which element they originated. This is accomplished by X-ray spectrometry, which is one way to transform the TEM into a far more powerful instrument, called an analytical electron microscope (AEM). Currently, the only commercial spectrometer that we use on theTEM is an X-ray energy-dispersive spectrometer (XEDS), which uses a Si semiconductor detector or sometimes a Ge detector. New detector technologies are emerging, which we’ll describe briefly. While some of these may render the Si detector obsolete, we’ll nevertheless emphasize this particular detector.},
	language = {en},
	urldate = {2021-09-02},
	booktitle = {Transmission {Electron} {Microscopy}: {A} {Textbook} for {Materials} {Science}},
	publisher = {Springer US},
	author = {Williams, David B. and Carter, C. Barry},
	editor = {Williams, David B. and Carter, C. Barry},
	year = {2009},
	doi = {10.1007/978-0-387-76501-3_32},
	keywords = {Analytical Electron Microscope, Charge Pulse, Count Rate, Dead Layer, Dead Time},
	pages = {581--603},
}

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