Nanomechanical properties and thermal stability of Al–N-co-doped DLC films prepared by filtered cathodic vacuum arc deposition. Wongpanya, P., Silawong, P., & Photongkam, P. Surface and Coatings Technology, 424:127655, Elsevier, 2021. bibtex @article{wongpanya2021nanomechanical,
title={Nanomechanical properties and thermal stability of Al--N-co-doped DLC films prepared by filtered cathodic vacuum arc deposition},
author={Wongpanya, Pornwasa and Silawong, Praphaphon and Photongkam, Pat},
journal={Surface and Coatings Technology},
volume={424},
pages={127655},
year={2021},
publisher={Elsevier}
}
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