@article{xiong_integrated_2012,
	title = {Integrated high frequency aluminum nitride optomechanical resonators},
	volume = {100},
	issn = {0003-6951},
	url = {https://aip.scitation.org/doi/abs/10.1063/1.4707898},
	doi = {10.1063/1.4707898},
	number = {17},
	urldate = {2020-09-22},
	journal = {Applied Physics Letters},
	author = {Xiong, Chi and Sun, Xiankai and Fong, King Y. and Tang, Hong X.},
	month = apr,
	year = {2012},
	note = {Publisher: American Institute of Physics},
	pages = {171111},
}

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