@techreport{xu_efficient_2003,
	title = {Efficient {Airflow} {Design} for {Cleanrooms} {Improves} {Business} {Bottom} {Lines}},
	url = {https://www.osti.gov/scitech/biblio/842509},
	language = {English},
	number = {LBNL--52004},
	urldate = {2017-09-06},
	institution = {Ernest Orlando Lawrence Berkeley National Laboratory, Berkeley, CA (US)},
	author = {Xu, Tengfang},
	month = jan,
	year = {2003},
	keywords = {Design, Energy conservation, Energy efficiency, Performance, and utilization, business, capitalized cost, consumption, contamination, management},
}

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