PLASMA DIAGNOSTICS DURING OFF-AXIS MAGNETRON SPUTTERING OF Y1BA2CU3O7 SINGLE TARGET - THE ABNORMAL RELATION BETWEEN TARGET SELF-BIAS VOLTAGE AND RF POWER. YAMAMOTO, K, EOM, C., SUN, J., KEITH, D, & GEBALLE, T. In STOCKBAUER, RL, KRISHNASWAMY, S., & KURTZ, R., editors, HIGH TC SUPERCONDUCTING THIN FILMS : PROCESSING, CHARACTERIZATION, AND APPLICATIONS, volume 200, of AIP CONFERENCE PROCEEDINGS, pages 87-94, 1990. AMER VACUUM SOC; AMER INST PHYS. 3RD TOPICAL SYMP OF THE AMERICAN VACUUM SOC - HIGH TC SUPERCONDUCTING THIN FILMS : PROCESSING, CHARACTERIZATION AND APPLICATIONS, BOSTON, MA, 1989
bibtex   
@inproceedings{ ISI:A1990BQ46K00012,
Author = {YAMAMOTO, K and EOM, CB and SUN, JZ and KEITH, D and GEBALLE, TH},
Editor = {{STOCKBAUER, RL and KRISHNASWAMY, SV and KURTZ, RL}},
Title = {{PLASMA DIAGNOSTICS DURING OFF-AXIS MAGNETRON SPUTTERING OF Y1BA2CU3O7
   SINGLE TARGET - THE ABNORMAL RELATION BETWEEN TARGET SELF-BIAS VOLTAGE
   AND RF POWER}},
Booktitle = {{HIGH TC SUPERCONDUCTING THIN FILMS : PROCESSING, CHARACTERIZATION, AND
   APPLICATIONS}},
Series = {{AIP CONFERENCE PROCEEDINGS}},
Year = {{1990}},
Volume = {{200}},
Pages = {{87-94}},
Note = {{3RD TOPICAL SYMP OF THE AMERICAN VACUUM SOC - HIGH TC SUPERCONDUCTING
   THIN FILMS : PROCESSING, CHARACTERIZATION AND APPLICATIONS, BOSTON, MA,
   1989}},
Organization = {{AMER VACUUM SOC; AMER INST PHYS}},
ISBN = {{0-88318-759-0}},
ResearcherID-Numbers = {{Nishida, Yasushi/G-7288-2016}},
ORCID-Numbers = {{Nishida, Yasushi/0000-0002-0232-5234}},
Unique-ID = {{ISI:A1990BQ46K00012}},
}
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