PLASMA DIAGNOSTICS DURING OFF-AXIS MAGNETRON SPUTTERING OF Y1BA2CU3O7 SINGLE TARGET - THE ABNORMAL RELATION BETWEEN TARGET SELF-BIAS VOLTAGE AND RF POWER. YAMAMOTO, K, EOM, C., SUN, J., KEITH, D, & GEBALLE, T. In STOCKBAUER, RL, KRISHNASWAMY, S., & KURTZ, R., editors, HIGH TC SUPERCONDUCTING THIN FILMS : PROCESSING, CHARACTERIZATION, AND APPLICATIONS, volume 200, of AIP CONFERENCE PROCEEDINGS, pages 87-94, 1990. AMER VACUUM SOC; AMER INST PHYS. 3RD TOPICAL SYMP OF THE AMERICAN VACUUM SOC - HIGH TC SUPERCONDUCTING THIN FILMS : PROCESSING, CHARACTERIZATION AND APPLICATIONS, BOSTON, MA, 1989bibtex @inproceedings{ ISI:A1990BQ46K00012,
Author = {YAMAMOTO, K and EOM, CB and SUN, JZ and KEITH, D and GEBALLE, TH},
Editor = {{STOCKBAUER, RL and KRISHNASWAMY, SV and KURTZ, RL}},
Title = {{PLASMA DIAGNOSTICS DURING OFF-AXIS MAGNETRON SPUTTERING OF Y1BA2CU3O7
SINGLE TARGET - THE ABNORMAL RELATION BETWEEN TARGET SELF-BIAS VOLTAGE
AND RF POWER}},
Booktitle = {{HIGH TC SUPERCONDUCTING THIN FILMS : PROCESSING, CHARACTERIZATION, AND
APPLICATIONS}},
Series = {{AIP CONFERENCE PROCEEDINGS}},
Year = {{1990}},
Volume = {{200}},
Pages = {{87-94}},
Note = {{3RD TOPICAL SYMP OF THE AMERICAN VACUUM SOC - HIGH TC SUPERCONDUCTING
THIN FILMS : PROCESSING, CHARACTERIZATION AND APPLICATIONS, BOSTON, MA,
1989}},
Organization = {{AMER VACUUM SOC; AMER INST PHYS}},
ISBN = {{0-88318-759-0}},
ResearcherID-Numbers = {{Nishida, Yasushi/G-7288-2016}},
ORCID-Numbers = {{Nishida, Yasushi/0000-0002-0232-5234}},
Unique-ID = {{ISI:A1990BQ46K00012}},
}
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{"_id":"79mHD6egdn3iQQTxw","bibbaseid":"yamamoto-eom-sun-keith-geballe-plasmadiagnosticsduringoffaxismagnetronsputteringofy1ba2cu3o7singletargettheabnormalrelationbetweentargetselfbiasvoltageandrfpower-1990","downloads":0,"creationDate":"2018-09-17T23:43:10.802Z","title":"PLASMA DIAGNOSTICS DURING OFF-AXIS MAGNETRON SPUTTERING OF Y1BA2CU3O7 SINGLE TARGET - THE ABNORMAL RELATION BETWEEN TARGET SELF-BIAS VOLTAGE AND RF POWER","author_short":["YAMAMOTO, K","EOM, C.","SUN, J.","KEITH, D","GEBALLE, T."],"year":1990,"bibtype":"inproceedings","biburl":"http://oxide.engr.wisc.edu/newWebsite/papers/oxide.bib","bibdata":{"bibtype":"inproceedings","type":"inproceedings","author":[{"propositions":[],"lastnames":["YAMAMOTO"],"firstnames":["K"],"suffixes":[]},{"propositions":[],"lastnames":["EOM"],"firstnames":["CB"],"suffixes":[]},{"propositions":[],"lastnames":["SUN"],"firstnames":["JZ"],"suffixes":[]},{"propositions":[],"lastnames":["KEITH"],"firstnames":["D"],"suffixes":[]},{"propositions":[],"lastnames":["GEBALLE"],"firstnames":["TH"],"suffixes":[]}],"editor":[{"firstnames":[],"propositions":[],"lastnames":["STOCKBAUER, RL"],"suffixes":[]},{"propositions":[],"lastnames":["KRISHNASWAMY"],"firstnames":["SV"],"suffixes":[]},{"propositions":[],"lastnames":["KURTZ"],"firstnames":["RL"],"suffixes":[]}],"title":"PLASMA DIAGNOSTICS DURING OFF-AXIS MAGNETRON SPUTTERING OF Y1BA2CU3O7 SINGLE TARGET - THE ABNORMAL RELATION BETWEEN TARGET SELF-BIAS VOLTAGE AND RF POWER","booktitle":"HIGH TC SUPERCONDUCTING THIN FILMS : PROCESSING, CHARACTERIZATION, AND APPLICATIONS","series":"AIP CONFERENCE PROCEEDINGS","year":"1990","volume":"200","pages":"87-94","note":"3RD TOPICAL SYMP OF THE AMERICAN VACUUM SOC - HIGH TC SUPERCONDUCTING THIN FILMS : PROCESSING, CHARACTERIZATION AND APPLICATIONS, BOSTON, MA, 1989","organization":"AMER VACUUM SOC; AMER INST PHYS","isbn":"0-88318-759-0","researcherid-numbers":"Nishida, Yasushi/G-7288-2016","orcid-numbers":"Nishida, Yasushi/0000-0002-0232-5234","unique-id":"ISI:A1990BQ46K00012","bibtex":"@inproceedings{ ISI:A1990BQ46K00012,\nAuthor = {YAMAMOTO, K and EOM, CB and SUN, JZ and KEITH, D and GEBALLE, TH},\nEditor = {{STOCKBAUER, RL and KRISHNASWAMY, SV and KURTZ, RL}},\nTitle = {{PLASMA DIAGNOSTICS DURING OFF-AXIS MAGNETRON SPUTTERING OF Y1BA2CU3O7\n SINGLE TARGET - THE ABNORMAL RELATION BETWEEN TARGET SELF-BIAS VOLTAGE\n AND RF POWER}},\nBooktitle = {{HIGH TC SUPERCONDUCTING THIN FILMS : PROCESSING, CHARACTERIZATION, AND\n APPLICATIONS}},\nSeries = {{AIP CONFERENCE PROCEEDINGS}},\nYear = {{1990}},\nVolume = {{200}},\nPages = {{87-94}},\nNote = {{3RD TOPICAL SYMP OF THE AMERICAN VACUUM SOC - HIGH TC SUPERCONDUCTING\n THIN FILMS : PROCESSING, CHARACTERIZATION AND APPLICATIONS, BOSTON, MA,\n 1989}},\nOrganization = {{AMER VACUUM SOC; AMER INST PHYS}},\nISBN = {{0-88318-759-0}},\nResearcherID-Numbers = {{Nishida, Yasushi/G-7288-2016}},\nORCID-Numbers = {{Nishida, Yasushi/0000-0002-0232-5234}},\nUnique-ID = {{ISI:A1990BQ46K00012}},\n}\n\n","author_short":["YAMAMOTO, K","EOM, C.","SUN, J.","KEITH, D","GEBALLE, T."],"editor_short":["STOCKBAUER, RL","KRISHNASWAMY, S.","KURTZ, R."],"key":"ISI:A1990BQ46K00012","id":"ISI:A1990BQ46K00012","bibbaseid":"yamamoto-eom-sun-keith-geballe-plasmadiagnosticsduringoffaxismagnetronsputteringofy1ba2cu3o7singletargettheabnormalrelationbetweentargetselfbiasvoltageandrfpower-1990","role":"author","urls":{},"downloads":0,"html":""},"search_terms":["plasma","diagnostics","during","axis","magnetron","sputtering","y1ba2cu3o7","single","target","abnormal","relation","between","target","self","bias","voltage","power","yamamoto","eom","sun","keith","geballe"],"keywords":[],"authorIDs":[],"dataSources":["zArY7xMz8KdDswhhx"]}