{"_id":"tnbJQqStPBqyQ7byL","bibbaseid":"yi-jang-an-hwang-joo-theselfformattingbarriercharacteristicsofcumgsiosub2subandcurusiosub2subfilmsforcuinterconnects-2008","downloads":0,"creationDate":"2016-02-10T20:02:43.578Z","title":"The self-formatting barrier characteristics of Cu-Mg/SiO<sub>2</sub> and Cu-Ru/SiO<sub>2</sub> films for Cu interconnects","author_short":["Yi, S.","Jang, K.","An, J.","Hwang, S.","Joo, Y."],"year":2008,"bibtype":"article","biburl":"http://www.dblp.org/rec/bibtex/journals/mr/YiJAHJ08","bibdata":{"title":"The self-formatting barrier characteristics of Cu-Mg/SiO<sub>2</sub> and Cu-Ru/SiO<sub>2</sub> films for Cu interconnects","author":["Seol-Min Yi","Kwang-Ho Jang","Jung-Uk An","Sang-Soo Hwang","Young-Chang Joo"],"author_short":["Yi, S.","Jang, K.","An, J.","Hwang, S.","Joo, Y."],"bibtype":"article","type":"article","year":"2008","key":"dblp3418190","id":"dblp3418190","biburl":"http://www.dblp.org/rec/bibtex/journals/mr/YiJAHJ08","url":"http://dx.doi.org/10.1016/j.microrel.2007.12.005","journal":"Microelectronics Reliability (MR)","pages":"744-748","number":"5","volume":"48","text":"Microelectronics Reliability (MR) 48(5):744-748 (2008)","bibtex":"@article{ dblp3418190,\n title = {The self-formatting barrier characteristics of Cu-Mg/SiO<sub>2</sub> and Cu-Ru/SiO<sub>2</sub> films for Cu interconnects},\n author = {Seol-Min Yi and Kwang-Ho Jang and Jung-Uk An and Sang-Soo Hwang and Young-Chang Joo},\n author_short = {Yi, S. and Jang, K. and An, J. and Hwang, S. and Joo, Y.},\n bibtype = {article},\n type = {article},\n year = {2008},\n key = {dblp3418190},\n id = {dblp3418190},\n biburl = {http://www.dblp.org/rec/bibtex/journals/mr/YiJAHJ08},\n url = {http://dx.doi.org/10.1016/j.microrel.2007.12.005},\n journal = {Microelectronics Reliability (MR)},\n pages = {744-748},\n number = {5},\n volume = {48},\n text = {Microelectronics Reliability (MR) 48(5):744-748 (2008)}\n}","bibbaseid":"yi-jang-an-hwang-joo-theselfformattingbarriercharacteristicsofcumgsiosub2subandcurusiosub2subfilmsforcuinterconnects-2008","role":"author","urls":{"Paper":"http://dx.doi.org/10.1016/j.microrel.2007.12.005"},"downloads":0},"search_terms":["self","formatting","barrier","characteristics","sio","sub","sub","sio","sub","sub","films","interconnects","yi","jang","an","hwang","joo"],"keywords":[],"authorIDs":[],"dataSources":["ymipNqc3w3esxjJdQ"]}