High-rate tunable ultrasonic force regulated nanomachining lithography with an atomic force microscope. Zhang, L. & Dong, J. Nanotechnology, 1, 2012.
abstract   bibtex   
... AFM nanomachining ... using ... under ...
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 abstract = {... AFM nanomachining ... using ... under ...},
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 author = {Zhang, L and Dong, J},
 journal = {Nanotechnology},
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