Local thickness measurement through scattering contrast and electron energy-loss spectroscopy. Zhang, H., Egerton, R. F., & Malac, M. Micron, 43(1):8–15, January, 2012. ![Local thickness measurement through scattering contrast and electron energy-loss spectroscopy [link]](https://bibbase.org/img/filetypes/link.svg "link")
Paper doi abstract bibtex Scattering contrast measurements were performed on thin films of amorphous carbon and polycrystalline Au, as well as single-crystal MgO nanocubes. Based on the exponential absorption law, mass-thickness can be obtained within 10% accuracy by measuring the incident and transmitted intensities in the same image. For mass-thickness measurement of a thin amorphous specimen, a small collection semiangle improves the measurement sensitivity, whereas for the measurement of polycrystalline or single-crystal specimens, a large collection semiangle should be used to reduce diffraction-contrast effects. EELS thickness measurements on MgO nanocubes suggest that the Kramers–Kronig sum-rule method (with correction for plural and surface scattering) gives 10% accuracy at medium collection semiangles but overestimates the thickness at small collection semiangles, due to underestimation of the surface-mode scattering. The log-ratio method, with a formula for inelastic mean free path proposed by Malis et al. (1988), provides 10% accuracy at small collection semiangle, while that proposed by Iakoubovskii et al. (2008a) is preferable for medium and large collection semiangles. As a result of this work, we provide recommendations of preferred methods and conditions for local-thickness measurement in the TEM.
@article{zhang_local_2012,
series = {Applications of {EELS} in {Materials} and {Physics} {Research}},
title = {Local thickness measurement through scattering contrast and electron energy-loss spectroscopy},
volume = {43},
issn = {0968-4328},
url = {http://www.sciencedirect.com/science/article/pii/S0968432811001120},
doi = {10.1016/j.micron.2011.07.003},
abstract = {Scattering contrast measurements were performed on thin films of amorphous carbon and polycrystalline Au, as well as single-crystal MgO nanocubes. Based on the exponential absorption law, mass-thickness can be obtained within 10\% accuracy by measuring the incident and transmitted intensities in the same image. For mass-thickness measurement of a thin amorphous specimen, a small collection semiangle improves the measurement sensitivity, whereas for the measurement of polycrystalline or single-crystal specimens, a large collection semiangle should be used to reduce diffraction-contrast effects. EELS thickness measurements on MgO nanocubes suggest that the Kramers–Kronig sum-rule method (with correction for plural and surface scattering) gives 10\% accuracy at medium collection semiangles but overestimates the thickness at small collection semiangles, due to underestimation of the surface-mode scattering. The log-ratio method, with a formula for inelastic mean free path proposed by Malis et al. (1988), provides 10\% accuracy at small collection semiangle, while that proposed by Iakoubovskii et al. (2008a) is preferable for medium and large collection semiangles. As a result of this work, we provide recommendations of preferred methods and conditions for local-thickness measurement in the TEM.},
number = {1},
urldate = {2017-09-05},
journal = {Micron},
author = {Zhang, Huai-Ruo and Egerton, Ray F. and Malac, Marek},
month = jan,
year = {2012},
keywords = {Electron energy-loss spectroscopy (EELS), Inelastic mean free path (IMFP), Mass-thickness contrast, Scattering cross section, Thickness measurement in TEM},
pages = {8--15},
}
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For mass-thickness measurement of a thin amorphous specimen, a small collection semiangle improves the measurement sensitivity, whereas for the measurement of polycrystalline or single-crystal specimens, a large collection semiangle should be used to reduce diffraction-contrast effects. EELS thickness measurements on MgO nanocubes suggest that the Kramers–Kronig sum-rule method (with correction for plural and surface scattering) gives 10% accuracy at medium collection semiangles but overestimates the thickness at small collection semiangles, due to underestimation of the surface-mode scattering. The log-ratio method, with a formula for inelastic mean free path proposed by Malis et al. (1988), provides 10% accuracy at small collection semiangle, while that proposed by Iakoubovskii et al. (2008a) is preferable for medium and large collection semiangles. 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Based on the exponential absorption law, mass-thickness can be obtained within 10\\% accuracy by measuring the incident and transmitted intensities in the same image. For mass-thickness measurement of a thin amorphous specimen, a small collection semiangle improves the measurement sensitivity, whereas for the measurement of polycrystalline or single-crystal specimens, a large collection semiangle should be used to reduce diffraction-contrast effects. EELS thickness measurements on MgO nanocubes suggest that the Kramers–Kronig sum-rule method (with correction for plural and surface scattering) gives 10\\% accuracy at medium collection semiangles but overestimates the thickness at small collection semiangles, due to underestimation of the surface-mode scattering. The log-ratio method, with a formula for inelastic mean free path proposed by Malis et al. (1988), provides 10\\% accuracy at small collection semiangle, while that proposed by Iakoubovskii et al. 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